DIELECTRIC PROPERTIES OF SiNx FILMS DEPOSITED AT LOW TEMPERATURE

YE CHAO; NING ZHAO-YUAN; MA YUN-XIU; SHEN MING-RONG; WANG HAO; GAN ZHAO-QIANG

doi:10.7498/aps.46.1199

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YE CHAO, NING ZHAO-YUAN, MA YUN-XIU, SHEN MING-RONG, WANG HAO, GAN ZHAO-QIANG. DIELECTRIC PROPERTIES OF SiNx FILMS DEPOSITED AT LOW TEMPERATUREJ. Acta Physica Sinica, 1997, 46(6): 1199-1205. DOI: 10.7498/aps.46.1199

Citation:

YE CHAO, NING ZHAO-YUAN, MA YUN-XIU, SHEN MING-RONG, WANG HAO, GAN ZHAO-QIANG. DIELECTRIC PROPERTIES OF SiNx FILMS DEPOSITED AT LOW TEMPERATUREJ. Acta Physica Sinica, 1997, 46(6): 1199-1205. DOI: 10.7498/aps.46.1199

Citation:

YE CHAO, NING ZHAO-YUAN, MA YUN-XIU, SHEN MING-RONG, WANG HAO, GAN ZHAO-QIANG. DIELECTRIC PROPERTIES OF SiNx FILMS DEPOSITED AT LOW TEMPERATUREJ. Acta Physica Sinica, 1997, 46(6): 1199-1205. DOI: 10.7498/aps.46.1199