YANG ZHI-WEI, HAN SHENG-HAO, YANG TIAN-LIN, ZHAO JUN-QING, MA JIN, MA HONG-LEI, CHENG CHUAN-FU. PREPARATION OF ITO FILMS ON WATER-COOLED FLEXIBLE SUBSTRATE BY BIAS R.F. MAGNETRON SPUTTERINGJ. Acta Physica Sinica, 2000, 49(6): 1196-1201. DOI: 10.7498/aps.49.1196
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Citation:
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YANG ZHI-WEI, HAN SHENG-HAO, YANG TIAN-LIN, ZHAO JUN-QING, MA JIN, MA HONG-LEI, CHENG CHUAN-FU. PREPARATION OF ITO FILMS ON WATER-COOLED FLEXIBLE SUBSTRATE BY BIAS R.F. MAGNETRON SPUTTERINGJ. Acta Physica Sinica, 2000, 49(6): 1196-1201. DOI: 10.7498/aps.49.1196
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YANG ZHI-WEI, HAN SHENG-HAO, YANG TIAN-LIN, ZHAO JUN-QING, MA JIN, MA HONG-LEI, CHENG CHUAN-FU. PREPARATION OF ITO FILMS ON WATER-COOLED FLEXIBLE SUBSTRATE BY BIAS R.F. MAGNETRON SPUTTERINGJ. Acta Physica Sinica, 2000, 49(6): 1196-1201. DOI: 10.7498/aps.49.1196
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Citation:
|
YANG ZHI-WEI, HAN SHENG-HAO, YANG TIAN-LIN, ZHAO JUN-QING, MA JIN, MA HONG-LEI, CHENG CHUAN-FU. PREPARATION OF ITO FILMS ON WATER-COOLED FLEXIBLE SUBSTRATE BY BIAS R.F. MAGNETRON SPUTTERINGJ. Acta Physica Sinica, 2000, 49(6): 1196-1201. DOI: 10.7498/aps.49.1196
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