EPITAXIAL GROWTH OF (0001)ORIENTED 6H-SiC FILMS ON Si(111) SUBSTRATE BY ORGANIC SOL-GEL FILM ANNEALING

WANG YU-XIA; GUO ZHEN; HE HAI-PING; CAO YING; TANG HONG-GUO

doi:10.7498/aps.50.256

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WANG YU-XIA, GUO ZHEN, HE HAI-PING, CAO YING, TANG HONG-GUO. EPITAXIAL GROWTH OF (0001)ORIENTED 6H-SiC FILMS ON Si(111) SUBSTRATE BY ORGANIC SOL-GEL FILM ANNEALINGJ. Acta Physica Sinica, 2001, 50(2): 256-261. DOI: 10.7498/aps.50.256

Citation:

WANG YU-XIA, GUO ZHEN, HE HAI-PING, CAO YING, TANG HONG-GUO. EPITAXIAL GROWTH OF (0001)ORIENTED 6H-SiC FILMS ON Si(111) SUBSTRATE BY ORGANIC SOL-GEL FILM ANNEALINGJ. Acta Physica Sinica, 2001, 50(2): 256-261. DOI: 10.7498/aps.50.256

Citation:

WANG YU-XIA, GUO ZHEN, HE HAI-PING, CAO YING, TANG HONG-GUO. EPITAXIAL GROWTH OF (0001)ORIENTED 6H-SiC FILMS ON Si(111) SUBSTRATE BY ORGANIC SOL-GEL FILM ANNEALINGJ. Acta Physica Sinica, 2001, 50(2): 256-261. DOI: 10.7498/aps.50.256