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中国物理学会期刊
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Shu Bin, Zhang He-Ming, Zhu Guo-Liang, Fan Min, Xuan Rong-Xi. Fabrication of SOI material based on smart-cut technologyJ. Acta Physica Sinica, 2007, 56(3): 1668-1673. DOI: 10.7498/aps.56.1668
Citation: Shu Bin, Zhang He-Ming, Zhu Guo-Liang, Fan Min, Xuan Rong-Xi. Fabrication of SOI material based on smart-cut technologyJ. Acta Physica Sinica, 2007, 56(3): 1668-1673. DOI: 10.7498/aps.56.1668
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Fabrication of SOI material based on smart-cut technology

Acta Phys. Sin., 2007, 56(3): 1668-1673.
DOI: 10.7498/aps.56.1668
CSTR: 32037.14.aps.56.1668
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