Yuan Qiang-Hua, Xin Yu, Huang Xiao-Jiang, Sun Kai, Ning Zhao-Yuan. Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2008, 57(11): 7038-7043. DOI: 10.7498/aps.57.7038
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Citation:
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Yuan Qiang-Hua, Xin Yu, Huang Xiao-Jiang, Sun Kai, Ning Zhao-Yuan. Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2008, 57(11): 7038-7043. DOI: 10.7498/aps.57.7038
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Yuan Qiang-Hua, Xin Yu, Huang Xiao-Jiang, Sun Kai, Ning Zhao-Yuan. Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2008, 57(11): 7038-7043. DOI: 10.7498/aps.57.7038
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Citation:
|
Yuan Qiang-Hua, Xin Yu, Huang Xiao-Jiang, Sun Kai, Ning Zhao-Yuan. Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2008, 57(11): 7038-7043. DOI: 10.7498/aps.57.7038
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