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中国物理学会期刊
Xi Guang-Ping, Ma Xiang-Yang, Tian Da-Xi, Zeng Yu-Heng, Gong Long-Fei, Yang De-Ren. Effects of low-temperature annealing on oxygen precipitate nucleation in heavily arsenic-doped Czochralski siliconJ. Acta Physica Sinica, 2008, 57(11): 7108-7113. DOI: 10.7498/aps.57.7108
Citation: Xi Guang-Ping, Ma Xiang-Yang, Tian Da-Xi, Zeng Yu-Heng, Gong Long-Fei, Yang De-Ren. Effects of low-temperature annealing on oxygen precipitate nucleation in heavily arsenic-doped Czochralski siliconJ. Acta Physica Sinica, 2008, 57(11): 7108-7113. DOI: 10.7498/aps.57.7108

Effects of low-temperature annealing on oxygen precipitate nucleation in heavily arsenic-doped Czochralski silicon

CSTR: 32037.14.aps.57.7108
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