Study on crystallization mechanism of hydrogenated silicon film

Li Shi-Bin; Wu Zhi-Ming; Li Wei; Yu Jun-Sheng; Jiang Ya-Dong; Liao Nai-Man

doi:10.7498/aps.57.7114

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Li Shi-Bin, Wu Zhi-Ming, Li Wei, Yu Jun-Sheng, Jiang Ya-Dong, Liao Nai-Man. Study on crystallization mechanism of hydrogenated silicon filmJ. Acta Physica Sinica, 2008, 57(11): 7114-7118. DOI: 10.7498/aps.57.7114

Citation:

Li Shi-Bin, Wu Zhi-Ming, Li Wei, Yu Jun-Sheng, Jiang Ya-Dong, Liao Nai-Man. Study on crystallization mechanism of hydrogenated silicon filmJ. Acta Physica Sinica, 2008, 57(11): 7114-7118. DOI: 10.7498/aps.57.7114

Citation:

Li Shi-Bin, Wu Zhi-Ming, Li Wei, Yu Jun-Sheng, Jiang Ya-Dong, Liao Nai-Man. Study on crystallization mechanism of hydrogenated silicon filmJ. Acta Physica Sinica, 2008, 57(11): 7114-7118. DOI: 10.7498/aps.57.7114