Thickness measurement of GaN films by X-ray diffraction

Li Hong-Tao; Luo Yi; Xi Guang-Yi; Wang Lai; Jiang Yang; Zhao Wei; Han Yan-Jun; Hao Zhi-Biao; Sun Chang-Zheng

doi:10.7498/aps.57.7119

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Li Hong-Tao, Luo Yi, Xi Guang-Yi, Wang Lai, Jiang Yang, Zhao Wei, Han Yan-Jun, Hao Zhi-Biao, Sun Chang-Zheng. Thickness measurement of GaN films by X-ray diffractionJ. Acta Physica Sinica, 2008, 57(11): 7119-7125. DOI: 10.7498/aps.57.7119

Citation:

Li Hong-Tao, Luo Yi, Xi Guang-Yi, Wang Lai, Jiang Yang, Zhao Wei, Han Yan-Jun, Hao Zhi-Biao, Sun Chang-Zheng. Thickness measurement of GaN films by X-ray diffractionJ. Acta Physica Sinica, 2008, 57(11): 7119-7125. DOI: 10.7498/aps.57.7119

Citation:

Li Hong-Tao, Luo Yi, Xi Guang-Yi, Wang Lai, Jiang Yang, Zhao Wei, Han Yan-Jun, Hao Zhi-Biao, Sun Chang-Zheng. Thickness measurement of GaN films by X-ray diffractionJ. Acta Physica Sinica, 2008, 57(11): 7119-7125. DOI: 10.7498/aps.57.7119