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Gao Jian-Ying, Li Yu-Ge, Lei Ming-Kai. Plasma characteristics in deep oscillation magnetron sputtering of chromium targetJ. Acta Physica Sinica, 2024, 73(16): 165201. DOI: 10.7498/aps.73.20240364
Citation: Gao Jian-Ying, Li Yu-Ge, Lei Ming-Kai. Plasma characteristics in deep oscillation magnetron sputtering of chromium targetJ. Acta Physica Sinica, 2024, 73(16): 165201. DOI: 10.7498/aps.73.20240364
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Plasma characteristics in deep oscillation magnetron sputtering of chromium target

Acta Phys. Sin., 2024, 73(16): 165201.
DOI: 10.7498/aps.73.20240364
CSTR: 32037.14.aps.73.20240364
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