Acta Physica Sinica
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Acta Physica Sinica  2018, Vol. 67 Issue (21): .     DOI: 10.7498/aps.67.20180305
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search |
Effects of process parameters on melt-crystal interface in Czochralski silicon crystal growth
Zhang Ni1\2, Liu Ding1\2, Feng Xue-Liang2
1. National and Local Joint Engineering Research Center of Crystal Growth Equipment and System Integration, Xi'an University of Technology, Xi'an 710048, China;
2. Shaanxi Key Laboratory of Complex System Control and Intelligent Information Processing, Xi'an 710048, China

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