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Femtosecond laser induced silicon surface cone microstructures by covering transparent films

Li Bao-Jia Zhou Ming Zhang Wei

Femtosecond laser induced silicon surface cone microstructures by covering transparent films

Li Bao-Jia, Zhou Ming, Zhang Wei
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  • We investigate the effect of preparation parameters on the formation of microstructures created on a single crystal silicon wafer covered with a polyethylene terephthalate (PET) transparent film by femtosecond pulse laser with a central wavelength of 800 nm. The results reveal that formation of the cone microstructures depends on laser fluence, and the cone microstructures cannot be created by lower laser fluence or can be destroyed by higher laser fluence. The laser scanning speed can directly affect the quality of the cone microstructures, and lower speed will destroy the cone, while higher speed will create indistinct cone microstructures each with smaller depth. Some idealized structures are obtained by optimizing the experimental parameters. Finally, we find that the cone microstructures on silicon wafer covered with a film are caused by both laser ablation and oxidation, and laser ablation plays a major role.
    • Funds: Project supported by Jiangsu Province Research Innovation Program of College Graduate, China (Grant No. CX08B_053Z), the National Basic Research Program of China (Grant No. 2011CB013004), the National Natural Science Foundation of China (Grant No. 50975129) and A Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions, China.
    [1]

    Yuan H, Yost V E, Page M R, Stradins P, Meier D L, Branz H M 2009 Appl. Phys. Lett. 95 123501

    [2]

    Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673

    [3]

    Her T H, Finlay R J, Wu C, Mazur E 2000 Appl. Phys. A 70 383

    [4]

    Lowndes D H, Fowlkes J D, Pedraza A J 2000 Appl. Surf. Sci. 154-155 647

    [5]

    Younkin R, Carey J E, Mazur E, Levinson J A, Friend C M 2003 J. Appl. Phys. 93 2626

    [6]

    Crouch C H, Carey J E, Warrender J M, Aziz M J, Mazur E, Génin F Y 2004 Appl. Phys. Lett. 84 1850

    [7]

    Crouch C H, Carey J E, Shen M Y, Mazur E, Génin F Y 2004 Appl. Phys. A 79 1635

    [8]

    Carey J E 2004 Ph. D. Dissertation (Harvard University) pp40-49

    [9]

    Sheehy M A, Winston L, Carey J E, Friend C M, Mazur E 2005 Chem. Mater. 17 3582

    [10]

    Tull B R, Carey J E, Mazur E, McDonald J P, Yalisove S M 2006 MRS Bulletin 31 626

    [11]

    Li P, Wang Y, Feng G J, Zheng C D, Zhao L, Zhu J T 2006 Chinese Journal of Lasers 33 1688 (in Chinese) [李平, 王煜, 冯国进, 郑春弟, 赵利, 朱京涛 2006 中国激光 33 1688]

    [12]

    Yuan C H, Li X H, Tang D C, Yang H D, Li G Q 2010 High Power Laser and Particle Beams 22 2749 (in Chinese) [袁春华, 李晓红, 唐多昌, 杨宏道, 李国强 2010 强激光与粒子束 22 2749]

    [13]

    Shen M Y, Crouch C H, Carey J E, Mazur E 2004 Appl. Phys. Lett. 85 5694

    [14]

    Men H N, Cheng G H, Sun C D 2006 High Power Laser and Particle Beams 18 1081 (in Chinese) [门海宁, 程光华, 孙传东 2006 强激光与粒子束 18 1081]

    [15]

    Yuan C H, Li X H, Tang D C, Yang H D, Li G Q 2010 Acta Phys. Sin. 59 7015 (in Chinese) [袁春华, 李晓红, 唐多昌, 杨宏道, 李国强 2010 物理学报 59 7015]

    [16]

    Yang H D, Li X H, Li G Q, Yuan C H, Tang D C, Xu Q, Qiu R, Wang J B 2011 Acta Phys. Sin. 60 027901 (in Chinese) [杨宏道, 李晓红, 李国强, 袁春华, 唐多昌, 徐琴, 邱荣, 王俊波 2011 物理学报 60 027901]

    [17]

    Goldman J R, Prybyla J A 1994 Phys. Rev. Lett. 72 1364

    [18]

    Gao X, Song X W, Guo K M, Tao H Y, Lin J Q 2011 Acta Phys. Sin. 60 025203 (in Chinese) [高勋, 宋晓伟, 郭凯敏, 陶海岩, 林景全 2011 物理学报 60 025203]

    [19]

    Linde D V, Tinten K S, Bialkowski J 1997 Appl. Surf. Sci. 109-110 1

    [20]

    Shank C V, Yen R, Hirlimann C 1983 Phys. Rev. Lett. 50 454

    [21]

    Shank C V, Yen R, Hirlimann C 1983 Phys. Rev. Lett. 51 900

    [22]

    Seel M, Bagus P S 1983 Phys. Rev. B 28 2023

    [23]

    Wu C, Crouch C H, Zhao L, Mazur E 2002 Appl. Phys. Lett. 81 1999

    [24]

    Stoian R, Ashkenasi D, Rosenfeld A, Campbell E E B 2000 Phys. Rev. B 62 13167

    [25]

    Wang R, Yang J J, Liang C Y, Wang H S, Han W, Yang Y 2009 Acta Phys. Sin. 58 5429 (in Chinese) [王锐, 杨建军, 梁春永, 王洪水, 韩伟, 杨阳 2009 物理学报 58 5429]

  • [1]

    Yuan H, Yost V E, Page M R, Stradins P, Meier D L, Branz H M 2009 Appl. Phys. Lett. 95 123501

    [2]

    Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673

    [3]

    Her T H, Finlay R J, Wu C, Mazur E 2000 Appl. Phys. A 70 383

    [4]

    Lowndes D H, Fowlkes J D, Pedraza A J 2000 Appl. Surf. Sci. 154-155 647

    [5]

    Younkin R, Carey J E, Mazur E, Levinson J A, Friend C M 2003 J. Appl. Phys. 93 2626

    [6]

    Crouch C H, Carey J E, Warrender J M, Aziz M J, Mazur E, Génin F Y 2004 Appl. Phys. Lett. 84 1850

    [7]

    Crouch C H, Carey J E, Shen M Y, Mazur E, Génin F Y 2004 Appl. Phys. A 79 1635

    [8]

    Carey J E 2004 Ph. D. Dissertation (Harvard University) pp40-49

    [9]

    Sheehy M A, Winston L, Carey J E, Friend C M, Mazur E 2005 Chem. Mater. 17 3582

    [10]

    Tull B R, Carey J E, Mazur E, McDonald J P, Yalisove S M 2006 MRS Bulletin 31 626

    [11]

    Li P, Wang Y, Feng G J, Zheng C D, Zhao L, Zhu J T 2006 Chinese Journal of Lasers 33 1688 (in Chinese) [李平, 王煜, 冯国进, 郑春弟, 赵利, 朱京涛 2006 中国激光 33 1688]

    [12]

    Yuan C H, Li X H, Tang D C, Yang H D, Li G Q 2010 High Power Laser and Particle Beams 22 2749 (in Chinese) [袁春华, 李晓红, 唐多昌, 杨宏道, 李国强 2010 强激光与粒子束 22 2749]

    [13]

    Shen M Y, Crouch C H, Carey J E, Mazur E 2004 Appl. Phys. Lett. 85 5694

    [14]

    Men H N, Cheng G H, Sun C D 2006 High Power Laser and Particle Beams 18 1081 (in Chinese) [门海宁, 程光华, 孙传东 2006 强激光与粒子束 18 1081]

    [15]

    Yuan C H, Li X H, Tang D C, Yang H D, Li G Q 2010 Acta Phys. Sin. 59 7015 (in Chinese) [袁春华, 李晓红, 唐多昌, 杨宏道, 李国强 2010 物理学报 59 7015]

    [16]

    Yang H D, Li X H, Li G Q, Yuan C H, Tang D C, Xu Q, Qiu R, Wang J B 2011 Acta Phys. Sin. 60 027901 (in Chinese) [杨宏道, 李晓红, 李国强, 袁春华, 唐多昌, 徐琴, 邱荣, 王俊波 2011 物理学报 60 027901]

    [17]

    Goldman J R, Prybyla J A 1994 Phys. Rev. Lett. 72 1364

    [18]

    Gao X, Song X W, Guo K M, Tao H Y, Lin J Q 2011 Acta Phys. Sin. 60 025203 (in Chinese) [高勋, 宋晓伟, 郭凯敏, 陶海岩, 林景全 2011 物理学报 60 025203]

    [19]

    Linde D V, Tinten K S, Bialkowski J 1997 Appl. Surf. Sci. 109-110 1

    [20]

    Shank C V, Yen R, Hirlimann C 1983 Phys. Rev. Lett. 50 454

    [21]

    Shank C V, Yen R, Hirlimann C 1983 Phys. Rev. Lett. 51 900

    [22]

    Seel M, Bagus P S 1983 Phys. Rev. B 28 2023

    [23]

    Wu C, Crouch C H, Zhao L, Mazur E 2002 Appl. Phys. Lett. 81 1999

    [24]

    Stoian R, Ashkenasi D, Rosenfeld A, Campbell E E B 2000 Phys. Rev. B 62 13167

    [25]

    Wang R, Yang J J, Liang C Y, Wang H S, Han W, Yang Y 2009 Acta Phys. Sin. 58 5429 (in Chinese) [王锐, 杨建军, 梁春永, 王洪水, 韩伟, 杨阳 2009 物理学报 58 5429]

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  • Received Date:  18 May 2012
  • Accepted Date:  25 June 2012
  • Published Online:  05 December 2012

Femtosecond laser induced silicon surface cone microstructures by covering transparent films

  • 1. School of Materials Science and Engineering, Jiangsu Provincial Key Laboratory of Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, China
Fund Project:  Project supported by Jiangsu Province Research Innovation Program of College Graduate, China (Grant No. CX08B_053Z), the National Basic Research Program of China (Grant No. 2011CB013004), the National Natural Science Foundation of China (Grant No. 50975129) and A Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions, China.

Abstract: We investigate the effect of preparation parameters on the formation of microstructures created on a single crystal silicon wafer covered with a polyethylene terephthalate (PET) transparent film by femtosecond pulse laser with a central wavelength of 800 nm. The results reveal that formation of the cone microstructures depends on laser fluence, and the cone microstructures cannot be created by lower laser fluence or can be destroyed by higher laser fluence. The laser scanning speed can directly affect the quality of the cone microstructures, and lower speed will destroy the cone, while higher speed will create indistinct cone microstructures each with smaller depth. Some idealized structures are obtained by optimizing the experimental parameters. Finally, we find that the cone microstructures on silicon wafer covered with a film are caused by both laser ablation and oxidation, and laser ablation plays a major role.

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