Abstract In this paper, a method to measure the specific contact resistance ρc of M-S bulk sample-the four-point configuration model-is presented. The location of. four circular metal electrodes is arbitrary and the equations for specific contact resistance ρc have been derived. It is shown that if the sample is not semi-infinite but has a definite thickness, the equation must be modified with some correction factors. According to this model, we carried out some measurements and calculations, the results are in good agreement with that of reference .