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Based on the established two-dimensional asymmetric model of the interaction between a nanosecond pulse laser and metallic aluminum, the effect of beam shaping on the evaporation ablation dynamics during the ablation of metallic aluminum by a nanosecond pulse laser is simulated. The results show that plasma shielding, which has a significant influence on the ablation properties of the target, occurs mainly in the middle phase and late phase of the pulse. Among the three laser profiles, the Gaussian beam has the strongest shielding effect. As the diameter of the reshaped flat-top beam increases, the shielding effect gradually weakens. The two-dimensional spatial distribution of target temperature is relatively different between ablation by a Gaussian beam and that by a flat-top beam. For the Gaussian beam, the center of the target is first heated, and then the temperature spreads in radial direction and axial direction. For the flat-top beam, due to the uniform energy distribution, the target is heated within a certain radial range simultaneously. Beam shaping has a great influence on the evaporation ablation dynamics of the target. For the Gaussian beam, the center of the target is first ablated, followed by the radial ablation. For the flat-top beam, the evaporation time of the target surface is delayed due to the lower energy density after the beam has been shaped. In addition, the target evaporates simultaneously in a certain radial range due to the more uniform distribution of laser energy. For each of the three laser profiles, the evaporation morphology of the target resembles the intensity distribution of the laser beam. The crater produced by the Gaussian beam is deep in the center and shallow on both sides, while it becomes relatively flat by the flat-top beam.
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Keywords:
- beam shaping /
- laser interaction with matter /
- vaporizing ablation /
- plasma shielding
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图 1 (a)平顶光束与铝靶相互作用示意图; (b)整形前后归一化激光强度; (c)激光光束轮廓; (d)几何模型和网格划分
Figure 1. (a) Schematics of the flat-top beam laser interaction with aluminum target; (b) normalized laser intensity before and after beam shaping; (c) laser beam profiles; (d) geometric model and mesh generation.
图 3 等离子体屏蔽前后到达靶面的激光脉冲归一化强度的时间分布
Figure 3. Temporal profile of the normalized intensity of laser pulse reaching the target surface before and after the plasma shielding.
图 4 F = 20 J/cm 2, 靶面中心温度随时间的演化
Figure 4. Time evolution of target surface center temperature for laser fluence of 20 J/cm2.
图 5 F= 20 J/cm 2, 考虑等离子体屏蔽时, 不同时刻的靶材温度分布 (a)—(e)高斯光束烧蚀结果; (f)—(j)平顶光束$ \left( {{r_1} = 1.2{\omega _0}} \right) $烧蚀结果; 其中, (a), (f)代表靶材蒸发开始时刻; (b), (g)代表高温开始时刻; (c), (h)代表高温结束时刻; (d), (i)代表靶材蒸发结束时刻; (e), (j)代表靶材仿真结束时刻
Figure 5. Temperature distribution of the target for laser fluence of 20 J/cm2 with considering the plasma shielding: (a)–(e) Gaussian beam ablation results; (f)–(j) flat-top beam ablation results; (a), (f) the initial time of evaporation; (b), (g) the initial time of high temperature; (c), (h) the end time of high temperature; (d), (i) the end time of evaporation; (e), (j) the end time of simulation.
图 6 F = 20 J/cm 2, 靶面中心处蒸发烧蚀速度和蒸发烧蚀深度随时间的演化 (a)烧蚀速度; (b)烧蚀深度
Figure 6. Time evolution of target surface center ablation velocity and ablation depth due to vaporization for laser fluence of 20 J/cm2: (a) Ablation velocity; (b) ablation depth.
图 7 F = 20 J/cm2, 靶材蒸发烧蚀坑形貌和总烧蚀深度 (a)实时蒸发形貌; (b)最终蒸发形貌; (c)总烧蚀深度
Figure 7. Target ablation crater morphology due to vaporization and total ablation depth for laser fluence of 20 J/cm2: (a) The real-time morphology due to vaporization; (b) the final morphology due to vaporization; (c) total ablation depth.
参数 数值 单位 密度
($\rho $)$ \rho = \left\{ {\begin{aligned} &{2700, }&&{T \leqslant {T_{\text{m}}}} \\ & {{\rho _{\text{c}}}\left[ {1 + 0.75\left( {1 - {T / {{T_{\text{c}}}}}} \right) + 3{{\left( {1 - {T / {{T_{\text{c}}}}}} \right)}^{{1/3}}}} \right], }&&{{T_{\text{m}}} < T \leqslant {0}{.8}{T_{\text{c}}}} \\ &{634, }&&{T > {0}{.8}{T_{\text{c}}}} \end{aligned}} \right. $ $ {{{\text{kg}}} \mathord{\left/ {\vphantom {{{\text{kg}}} {{{\text{m}}^{3}}}}} \right. } {{{\text{m}}^{3}}}} $ 电导率
($\sigma $)$ \sigma \left( T \right) = \left\{ {\begin{aligned} &{3.69 \times {{10}^7}, }&&{T \leqslant {T_{\text{m}}}} \\ & {{{{{10}^8}} / {\left( {0.00852 T + 15.32896} \right), }}}&&{{T_{\text{m}}} < T \leqslant {0}{.8}{T_{\text{c}}}} \\ &{2.52 \times {{10}^4}, }&&{T > {0}{.8}{T_{\text{c}}}} \end{aligned}} \right. $ $ {{\text{S}} \mathord{\left/ {\vphantom {{\text{S}} {\text{m}}}} \right. } {\text{m}}} $ 热导率
($k$)$ k\left( T \right) = \left\{ {\begin{aligned}& {237, }&&{T \leqslant {T_{\text{m}}}} \\ &{2.44 \times {{10}^{ - 8}}\sigma \left( T \right)T, }&&{T > {T_{\text{m}}}} \end{aligned}} \right. $ $ {{\text{W}} \mathord{\left/ {\vphantom {{\text{W}} {{\text{(m}} \cdot {\text{K)}}}}} \right. } {{\text{(m}} \cdot {\text{K)}}}} $ 反射率
($R$)$ R = \left\{ {\begin{aligned} &{95{\text{%}} , }&&{T \leqslant {T_{\text{m}}}} \\ &{\frac{{{{\left[ {{n_{\text{R}}}\left( T \right) - 1} \right]}^2} + n_{\text{I}}^{2}\left( T \right)}}{{{{\left[ {{n_{\text{R}}}\left( T \right) + 1} \right]}^2} + n_{\text{I}}^{2}\left( T \right)}}, }&&{{T_{\text{m}}} < T \leqslant {0}{.8}{T_{\text{c}}}} \\ &{{\text{69{\text{%}} , }}}&&{T > {0}{.8}{T_{\text{c}}}} \end{aligned}} \right. $ $1$ 吸收系数
($\alpha $)$ \alpha = \left\{ {\begin{aligned} &{1.5 \times {{10}^8}, }&&{T < {T_{\text{m}}}} \\ & {{{4{\text{π }}} / {(\lambda }}{n_{\text{I}}}\left( T \right)), }&&{{T_{\text{m}}} \leqslant T \leqslant {0}{.8}{T_{\text{c}}}} \\ & {8.5 \times {{10}^6}, }&&{T > {0}{.8}{T_{\text{c}}}} \end{aligned}} \right. $ ${{\text{m}}^{{{ - 1}}}}$ 注: ${n_{\text{R}}}$和${n_{\text{I}}}$分别代表折射率的实部和虚部 
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参数 符号 数值 单位 固相线温度 ${T_{\text{s}}}$ 936.15 K 液相线温度 ${T_{\text{l}}}$ 939.15 K 熔点 ${T_{\text{m}}}$ 933 K 沸点 ${T_{\text{v}}}$ 2793 K 临界温度 ${T_{\text{c}}}$ 6700 K 临界密度 ${\rho _{\text{c}}}$ 634 ${{{\text{kg}}} / {{{\text{m}}^{3}}}}$ 固相恒压热容 ${C_{{\text{ps}}}}$ 917 $ {{\text{J}} / {\left( {{\text{kg}} \cdot {\text{K}}} \right)}} $ 液相恒压热容 ${C_{{\text{pl}}}}$ 1080 $ {{\text{J}} /{\left( {{\text{kg}} \cdot {\text{K}}} \right)}} $ 融化潜热 ${L_{\text{m}}}$ $ 3.69 \times {10^{5}} $ $ {{\text{J}} /{{\text{kg}}}} $ 蒸发潜热 ${L_{\text{v}}}$ $ {1}{.05} \times {10^{7}} $ $ {{\text{J}} /{{\text{kg}}}} $
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