Effect of dry etching on light emission of InAsP/InP SMQWs

Cao Meng; Wu Hui-Zhen; Liu Cheng; Lao Yan-Feng; Huang Zhan-Chao; Xie Zheng-Sheng; Zhang Jun; Jiang Shan

doi:10.7498/aps.56.1027

Search

x

中国物理学会期刊

Advanced Search

Cao Meng, Wu Hui-Zhen, Liu Cheng, Lao Yan-Feng, Huang Zhan-Chao, Xie Zheng-Sheng, Zhang Jun, Jiang Shan. Effect of dry etching on light emission of InAsP/InP SMQWs. Acta Physica Sinica, 2007, 56(2): 1027-1031. DOI: 10.7498/aps.56.1027

Citation:

Cao Meng, Wu Hui-Zhen, Liu Cheng, Lao Yan-Feng, Huang Zhan-Chao, Xie Zheng-Sheng, Zhang Jun, Jiang Shan. Effect of dry etching on light emission of InAsP/InP SMQWs. Acta Physica Sinica, 2007, 56(2): 1027-1031. DOI: 10.7498/aps.56.1027

Citation:

Cao Meng, Wu Hui-Zhen, Liu Cheng, Lao Yan-Feng, Huang Zhan-Chao, Xie Zheng-Sheng, Zhang Jun, Jiang Shan. Effect of dry etching on light emission of InAsP/InP SMQWs. Acta Physica Sinica, 2007, 56(2): 1027-1031. DOI: 10.7498/aps.56.1027