Search

x
中国物理学会期刊
Advanced Search
Ma Xiao-Tao, Zheng Wan-Hua, Ren Gang, Fan Zhong-Chao, Chen Liang-Hui. Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal. Acta Physica Sinica, 2007, 56(2): 977-981. DOI: 10.7498/aps.56.977
Citation: Ma Xiao-Tao, Zheng Wan-Hua, Ren Gang, Fan Zhong-Chao, Chen Liang-Hui. Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal. Acta Physica Sinica, 2007, 56(2): 977-981. DOI: 10.7498/aps.56.977
shu

Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

Acta Phys. Sin., 2007, 56(2): 977-981.
DOI: 10.7498/aps.56.977
CSTR: 32037.14.aps.56.977
PDF
Get Citation

  • Abstract

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return