Electrical and optical properties of Cu-Al-O thin films sputtered using non-stoichiometric target

Pan Jia-Qi; Zhu Chen-Quan; Li Yu-Ren; Lan Wei; Su Qing; Liu Xue-Qin; Xie Er-Qing

doi:10.7498/aps.60.117307

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Pan Jia-Qi, Zhu Chen-Quan, Li Yu-Ren, Lan Wei, Su Qing, Liu Xue-Qin, Xie Er-Qing. Electrical and optical properties of Cu-Al-O thin films sputtered using non-stoichiometric target. Acta Physica Sinica, 2011, 60(11): 117307. DOI: 10.7498/aps.60.117307

Citation:

Pan Jia-Qi, Zhu Chen-Quan, Li Yu-Ren, Lan Wei, Su Qing, Liu Xue-Qin, Xie Er-Qing. Electrical and optical properties of Cu-Al-O thin films sputtered using non-stoichiometric target. Acta Physica Sinica, 2011, 60(11): 117307. DOI: 10.7498/aps.60.117307

Citation:

Pan Jia-Qi, Zhu Chen-Quan, Li Yu-Ren, Lan Wei, Su Qing, Liu Xue-Qin, Xie Er-Qing. Electrical and optical properties of Cu-Al-O thin films sputtered using non-stoichiometric target. Acta Physica Sinica, 2011, 60(11): 117307. DOI: 10.7498/aps.60.117307