Integration of SRO/PZT/SRO/Ni-Al/Cu/Ni-Al/SiO2/Si ferroelectric capacitor with copper

Chen Jian-Hui; Liu Bao-Ting; Zhao Qing-Xun; Cui Yong-Liang; Zhao Dong-Yue; Guo Zhe

doi:10.7498/aps.60.117701

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中国物理学会期刊

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Chen Jian-Hui, Liu Bao-Ting, Zhao Qing-Xun, Cui Yong-Liang, Zhao Dong-Yue, Guo Zhe. Integration of SRO/PZT/SRO/Ni-Al/Cu/Ni-Al/SiO2/Si ferroelectric capacitor with copperJ. Acta Physica Sinica, 2011, 60(11): 117701. DOI: 10.7498/aps.60.117701

Citation:

Chen Jian-Hui, Liu Bao-Ting, Zhao Qing-Xun, Cui Yong-Liang, Zhao Dong-Yue, Guo Zhe. Integration of SRO/PZT/SRO/Ni-Al/Cu/Ni-Al/SiO2/Si ferroelectric capacitor with copperJ. Acta Physica Sinica, 2011, 60(11): 117701. DOI: 10.7498/aps.60.117701

Citation:

Chen Jian-Hui, Liu Bao-Ting, Zhao Qing-Xun, Cui Yong-Liang, Zhao Dong-Yue, Guo Zhe. Integration of SRO/PZT/SRO/Ni-Al/Cu/Ni-Al/SiO2/Si ferroelectric capacitor with copperJ. Acta Physica Sinica, 2011, 60(11): 117701. DOI: 10.7498/aps.60.117701