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非均匀沟道MOS辐照正空间电荷迁移率模型

李泽宏 李肇基 张 波 方 健

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非均匀沟道MOS辐照正空间电荷迁移率模型

李泽宏, 李肇基, 张 波, 方 健

Mobility model of nonuniform channel MOS by radiation induced positive spatial charge

Li Ze-Hong, Li Zhao-Ji, Zhang Bo, Fan Jian
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  • 提出非均匀沟道MOS辐照正空间电荷迁移率模型.借助镜像法导出沟道电离杂质与辐照正空间电荷的二维场和二维互作用势的分布,由此给出非均匀n沟和p沟的迁移率表示式,其解析解与二维仿真值十分吻合.还借助二维仿真器计算均匀沟道MOS辐照正空间电荷迁移率的变化值,其值和文献[2,3]实验数据一致.
    In this paper we suggest a radiation mobility shift model for the nonuniform channel metal-oxide-semiconductor(MOS). The distribution of two-dimensional(2D)-electric field and 2D-interaction potential, which is caused by the interaction between the ionized impurity in the depletion layer and radiation-induced positive spatial charge, is analyzed by using image charge method. The mobility expression of n-type and p-type nonuniform channel MOS is proposed. Using 2D simulator MEDICI, we simulate the mobility shift with the radiation-induced positive spatial charge. The nonuniform channel MOS's mobility shift numerical results agree well with the analytical results. Uniform channel MOS's mobility shift value agrees with that of the experiment.
    • 基金项目: 国家自然科学基金(批准号:19972010)资助的课题.
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  • 文章访问数:  6030
  • PDF下载量:  662
  • 被引次数: 0
出版历程
  • 收稿日期:  2002-11-27
  • 修回日期:  2003-05-25
  • 刊出日期:  2004-01-05

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