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激光诱导HF酸刻蚀后熔石英后表面划痕的损伤行为研究

王凤蕊 黄进 刘红婕 周信达 蒋晓东 吴卫东 郑万国

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激光诱导HF酸刻蚀后熔石英后表面划痕的损伤行为研究

王凤蕊, 黄进, 刘红婕, 周信达, 蒋晓东, 吴卫东, 郑万国

Laser induced rear-surface-crack damage properties of fused silica etched with HF solution

Wang Feng-Rui, Huang Jin, Liu Hong-Jie, Zhou Xin-Da, Jiang Xiao-Dong, Wu Wei-Dong, Zheng Wan-Guo
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  • 用光学显微镜和原子力显微镜记录HF酸刻蚀后熔石英元件后表面划痕的形貌结构,并利用单脉冲激光对其进行辐照测试,以研究不同结构参数划痕的激光损伤特性.实验结果表明,由于HF酸的腐蚀钝化作用,划痕结构横向截面呈余弦形分布;其初始损伤阈值并非由单一的划痕宽度或深度参数决定,而是与其横向剖面结构的宽深比值密切相关;通过实验得到了二者之间的关系曲线,并采用时域有限差分算法对不同结构参数划痕附近光场分布进行理论模拟,理论场计算得到的增强结果与实验值符合得很好.
    The micro subsurface cracks of fused silica etched with HF solution were recorded using atomic force microscope (AFM) and optical microscope. The damage characteristics of cracks with different structures were studied. Experimental results show that after HF etching, the cracks cross section turns into cosine pattern, and its laser induced damage threshold (LIDT) is not determined by the individual breadth or depth parameters, but by the breadth depth ratio of the crack cross section. The curve of LIDT versus the cracks breadth depth ratio was experimentally obtained. Finite difference time domain algorithm was used to calculate the electric field intensity distribution in the vicinity of a crack with cosine cross section, and the theoretical results agree well with the experimental ones.
    • 基金项目: 国家高技术研究发展计划(批准号:2008AA8040508)资助的课题.
    [1]

    Chen X Q, Zu X T, Zheng W G, Jiang X D, Lü H B, Ren H, Zhang Y Z, Liu C M 2006 Acta Phys. Sin. 55 1206 (in Chinese) [陈习权、祖小涛、郑万国、蒋晓东、吕海兵、任 寰、张艳珍、刘春明 2006 物理学报 55 1206]

    [2]

    Sun C W, Lu Q S, Fan Z X 2002 Laser Irradiation Effect (Beijing:National Defence Industry Press)280—286 (in Chinese)[孙承伟、陆启生、范正修 2002 激光辐照效应 (北京: 国防工业出版社)第280—286页]

    [3]

    Laser and Particle Beams 17 67 (in Chinese) [王 毅、许 乔、柴立群、陈 宁、朱湘琴 2005 强激光与粒子束 17 67]

    [4]

    Bloenbergen N 1973 Appl. Opt. 12 661

    [5]

    Ge 'nin F Y, Salleo A, Pistor T V 2001 J. Opt. Soc. Am. A 18 2607

    [6]

    Yao X, Gao F H, Li J F, Zhang Y X, Wen S L, Guo Y K 2008 Acta Phys. Sin. 57 4891 (in Chinese) [姚 欣、高福华、李剑峰、张怡霄、温圣林、郭永康 2008 物理学报 57 4891]

    [7]

    Stevens-Kalceff M A, Wong J 2005 J. Appl. Phys. 97 113519

    [8]

    Wang Y, Xu Q, Chai L Q, Chen N, Zhu X Q 2005 High Power

    [9]

    Salleo A, Génin F Y, Yoshiyama J, Stolz C J, Kozlowski M R 1998 Proc. SPIE 3244 341

    [10]

    Neauport J, Lamaignere L, Bercegol H, Pilon F, Birolleau J C 2005 Opt. Express 13 10163

    [11]

    Ge 'nin F Y, Kozloski M R, Feit M D 1998 LLNLReport UCRL-ID-0130003 1

    [12]

    Feit M D, Rubenchik A M 2002 Proc. SPIE 4679 321

    [13]

    Ge D B, Yan Y B 2002 Electromagnetic Wave and FDTD (Xian: Xidian University Press) (in Chinese) [葛德彪、闫玉波 2002 电磁波时域有限差分方法 (西安: 西安电子科技大学出版社)]

    [14]

    Prasad R R, Bruere J R, Peterson J E, Halpin J M, Borden M R, Hackel R P 2004 Proc. SPIE 5273 288

  • [1]

    Chen X Q, Zu X T, Zheng W G, Jiang X D, Lü H B, Ren H, Zhang Y Z, Liu C M 2006 Acta Phys. Sin. 55 1206 (in Chinese) [陈习权、祖小涛、郑万国、蒋晓东、吕海兵、任 寰、张艳珍、刘春明 2006 物理学报 55 1206]

    [2]

    Sun C W, Lu Q S, Fan Z X 2002 Laser Irradiation Effect (Beijing:National Defence Industry Press)280—286 (in Chinese)[孙承伟、陆启生、范正修 2002 激光辐照效应 (北京: 国防工业出版社)第280—286页]

    [3]

    Laser and Particle Beams 17 67 (in Chinese) [王 毅、许 乔、柴立群、陈 宁、朱湘琴 2005 强激光与粒子束 17 67]

    [4]

    Bloenbergen N 1973 Appl. Opt. 12 661

    [5]

    Ge 'nin F Y, Salleo A, Pistor T V 2001 J. Opt. Soc. Am. A 18 2607

    [6]

    Yao X, Gao F H, Li J F, Zhang Y X, Wen S L, Guo Y K 2008 Acta Phys. Sin. 57 4891 (in Chinese) [姚 欣、高福华、李剑峰、张怡霄、温圣林、郭永康 2008 物理学报 57 4891]

    [7]

    Stevens-Kalceff M A, Wong J 2005 J. Appl. Phys. 97 113519

    [8]

    Wang Y, Xu Q, Chai L Q, Chen N, Zhu X Q 2005 High Power

    [9]

    Salleo A, Génin F Y, Yoshiyama J, Stolz C J, Kozlowski M R 1998 Proc. SPIE 3244 341

    [10]

    Neauport J, Lamaignere L, Bercegol H, Pilon F, Birolleau J C 2005 Opt. Express 13 10163

    [11]

    Ge 'nin F Y, Kozloski M R, Feit M D 1998 LLNLReport UCRL-ID-0130003 1

    [12]

    Feit M D, Rubenchik A M 2002 Proc. SPIE 4679 321

    [13]

    Ge D B, Yan Y B 2002 Electromagnetic Wave and FDTD (Xian: Xidian University Press) (in Chinese) [葛德彪、闫玉波 2002 电磁波时域有限差分方法 (西安: 西安电子科技大学出版社)]

    [14]

    Prasad R R, Bruere J R, Peterson J E, Halpin J M, Borden M R, Hackel R P 2004 Proc. SPIE 5273 288

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出版历程
  • 收稿日期:  2009-04-27
  • 修回日期:  2009-11-03
  • 刊出日期:  2010-07-15

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