Co离子注入TiO2薄膜的显微结构和磁性研究

丁芃; 刘发民; 杨新安; 李建奇

doi:10.7498/aps.60.036803

摘要

利用直流磁控溅射技术在玻璃衬底上沉积了TiO2薄膜,并对其进行了Co离子注入,最后在真空中500 ℃退火50 min,得到系列薄膜样品. 利用剥离-分散方法制备了薄膜的透射电镜样品,并用扫描电镜(SEM)、X射线能量散射谱(EDX)和高分辨透射电镜(HRTEM)对样品做了近似原位观察,研究了薄膜样品中不同Co离子注入深度的成分分布和显微结构. 结果表明,薄膜呈锐钛矿结构,Co元素主要分布在薄膜表层,Co离子的注入使TiO2薄膜的晶粒被部分破坏,并形成CoO,而5

关键词:

Abstract

TiO2 thin films were prepared by direct current magnetron sputtering on glass substrates, then were implanted by cobalt ions, and finally annealed at 500 ℃ for 50 min. Specimens for transmission electron microscopy were prepared by peeling-scattering technology, and were observed in situ by scanning electron microscopy (SEM), energy dispersive X-ray (EDX) and high resolution transmission electron microscopy (HRTEM). The films were identified as anatase structure. The Co ions exist mainly in a thin layer beneath the surface of the films. The implanted Co ions damage the TiO2 crystals and some of them exist as CoO. The annealing treatment could repair the TiO2 grains and make the Co ions diffuse into the TiO2 lattice. The vibrating sample magnetometer (VSM) measurements show that the Co ion implanted TiO2 films are ferromagnetic at room temperature and the annealing treatment in vacuum could enhance the ferromagnetism, which could be explained within the scope of the BMP theory.

Keywords:

作者及机构信息

(1)北京航空航天大学物理科学与核能工程学院,微纳测控与低维物理教育部重点实验室,北京 100191; (2)北京凝聚态物理国家实验室,中国科学院物理研究所,北京 100190

基金项目: 北京航空航天大学博士研究生创新基金(批准号:292122)资助的课题.

Authors and contacts

(1)Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China; (2)School of Physics and Nuclear Energy Engineering, Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education), Beijing University of Aeronautics and Astronautics, Beijing 100191, China

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施引文献

[1]	Shen L, Zhu G H, Guo W B, Chen T, Zhang X D, Liu C X, Chen W Y, Ruan S P, Zhong Z C 2008 Appl. Phys. Lett. 92 073307
[2]	Yu H Z, Peng J B, Liu J C 2009 Acta Phys. Sin. 58 669 (in Chinese) [於黄忠、彭俊彪、刘金成 2009 物理学报 58 669]
[3]	Liang L Y, Dai S Y, Fang X Q, Hu L H 2008 Acta Phys. Sin. 57 1956 (in Chinese) [梁林云、戴松元、方霞琴、胡林华 2008 物理学报 57 1956]
[4]	Zhang Y, Zhao Y, Cai N, Xiong S Z 2008 Acta Phys. Sin. 57 5806 (in Chinese) [张苑、赵颖、蔡宁、熊绍珍 2008 物理学报 57 5806]
[5]	Asahi R, Morikawa T, Ohwaki T, Aoki K, Taga Y 2001 Science 293 269
[6]	Zhao Z Y, Liu Q J, Zhu Z Q, Zhang J 2008 Acta Phys. Sin. 57 3760 (in Chinese) [赵宗彦、柳清菊、朱忠其、张瑾 2008 物理学报 57 3760]
[7]	Zeng W, Liu T M 2010 Physica B 405 1345
[8]	Matsumoto Y, Murakami M, Shono T, Hasegawa T, Fukumura T, Kawasaki M, Ahmet P, Chikyow T, Koshihara S, Koinuma H 2001 Science 291 854
[9]	Karthik K, Pandian S K, Kumar K S, Jaya N V 2010 Appl. Surf. Sci. 256 4757
[10]	Xu J P, Shi S B, Li L, Zhang X S, Wang Y X, Chen X M, Wang J F, Lv L Y, Zhang F M, Zhong W 2010 J. Appl. Phys. 107 053910
[11]	Lee Y J, de Jong M P, Jansen R 2010 Appl. Phys. Lett. 96 082506
[12]	Lee J K, Jung H S, Valdez J A, Hundley M F, Thompson J D, Sickafus K E, Nastasi M, Hamby D W, Lucca D A 2006 Nucl. Instrum. Methods Phys. Res. B 250 279
[13]	Liu F M, Ding P, Yang X A, Li J Q 2009 Nucl. Instrum. Methods Phys. Res. B 267 3104
[14]	Mi W B, Jiang E Y, Bai H L 2009 J. Magn. Magn. Mater. 321 2472
[15]	Sakurai J, Buyers W J L, Cowley R A, Dolling G 1968 Phys. Rev. 167 510
[16]	Das S, Patra M, Majumdar S, Giri S 2009 J. Alloys Compd. 488 27
[17]	Coey J M D, Venkatesan M, Fitzgerald C B 2005 Nature Mater. 4 173
[18]	Pereira L C J, Nunes M R, Monteiro O C, Silvestre A J 2008 Appl. Phys. Lett. 93 222502
[19]	Bak T, Nowotny J, Rekas M, Sorrell C C 2003 J. Phys. Chem. Solids 64 1057

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