机器视觉在激光干涉测量d31中的应用

来志; 郭亮; 李小珍; 党文佳

doi:10.7498/aps.62.184207

摘要

提出一种应用机器视觉技术的激光干涉法, 可以研究压电材料的逆压电系数. 在传统干涉测量法中引入机器视觉实现干涉图像灰度最佳估计, 使用数字图像处理技术, 一方面应用降噪算法有效去除激光干涉图样中的噪声, 从而确定激光干涉场的光强分布, 另一方面将干涉图样的明暗变化进一步转化为可量度的灰度变化以提高测量分辨力. 通过合理设计算法, 该方法中对位移的理论测量分辨力可以提高达一个数量级, 为干涉光波长的1/1024, 因此在逆压电系数d31 的实验测量中可以有效提高分辨力.

关键词:

Abstract

A novel method based on machine vision is proposed for measuring the effective d31 coefficient. Based on the best estimation of gray scale of interference pattern, the sensitivity of the twin-beam interferometry is significantly improved in comparison with previously reported system. Firstly, the interference pattern grabbed by machine vision system is extracted using the algorithm developed in this work. Secondly, using gray-scale pattern with 256 gray-levels the measurement accuracy of the interferometric optical path difference of the interferometer can reach 1/1024 of the wavelength of the laser theoretically. So the experimental results of a PZT pipe in the method are greatly accurate.

Keywords:

作者及机构信息

1.
西安电子科技大学物理与光电工程学院, 西安 710071

基金项目: 中央高校基本科研业务费专项资金(批准号:K5051205004)和国家自然科学基金(批准号:61107006)资助的课题.

Authors and contacts

1.
School of Physics Optoelectronic Engineering, Xidian University, Xi’an 710071, China

Funds: Project supported by the Fundamental Research Funds for the Central Universities of Ministry of Education of China (Grant No. K5051205004), and the National Natural Science Foundation of China (Grant No. 61107006).

参考文献

[1]	Jae Lee H, Zhang S, Meyer R J, Sherlock N P, Shrout T R 2012 Appl. Phys. Lett. 101 032902
[2]	Dekkers M, Boschker H, van Zalk M, Nguyen M, Nazeer H, Houwman E, Rijnders G 2013 J. Micromech. Microengin. 23 025008
[3]	Chen D R, Li G R, Yin Q R 1997 J. Inorganic Mater. 12 861 (in Chinese) [陈大任, 李国荣, 殷庆瑞 1997 无机材料学报 12 861]
[4]	Wu X M, Chen J B, Zhu R H, Cheng L J, Wang Q, Zhu Q S 2002 Infr. Laser Engin. 31 257 (in Chinese) [吴新民, 陈进榜, 朱日宏, 程丽君, 王青, 朱应时 2002 红外与激光工程 31 257]
[5]	Ji C, Zhang L Y, Dou S X, Wang P Y 2011 Acta Phys. Sin. 60 098703 (in Chinese) [季超, 张凌云, 窦硕星, 王鹏业 2011 物理学报 60 098703]
[6]	Fan W X, Zhang M, Wang X M 2004 J. Xi’an Univ. Engin. Sci. Technol. 18 160 (in Chinese) [樊文侠, 张敏, 王新明 2004 西安工程科技学院学报 18 160]
[7]	Yan Z G, Lin Y L, Yang J, Li Z H, Bian B M 2012 Acta Phys. Sin. 61 200502 (in Chinese) [闫振纲, 林颖璐, 杨娟, 李振华, 卞保民 2012 物理学报 61 200502]
[8]	Lin Y L, Yan Z G, Yang J, Wang C Y, Bian B M 2012 Acta Phys. Sin. 61 100505 (in Chinese) [林颖璐, 闫振纲, 杨娟, 王春勇, 卞保民 2012 物理学报 61 100505]
[9]	Mesarović V Z, Galatsanos N P, Wernick M N 2000 JOSA A 17 711
[10]	Ni Y C 2009 Shiyong Celiang Buquedingdu Pingding (Beijing: China Metrology Publishing House) p107 (in Chinese) [倪育才 2009 实用测量不确定度评定 (北京: 中国计量出版社) 第107页]

施引文献

[1]	Jae Lee H, Zhang S, Meyer R J, Sherlock N P, Shrout T R 2012 Appl. Phys. Lett. 101 032902
[2]	Dekkers M, Boschker H, van Zalk M, Nguyen M, Nazeer H, Houwman E, Rijnders G 2013 J. Micromech. Microengin. 23 025008
[3]	Chen D R, Li G R, Yin Q R 1997 J. Inorganic Mater. 12 861 (in Chinese) [陈大任, 李国荣, 殷庆瑞 1997 无机材料学报 12 861]
[4]	Wu X M, Chen J B, Zhu R H, Cheng L J, Wang Q, Zhu Q S 2002 Infr. Laser Engin. 31 257 (in Chinese) [吴新民, 陈进榜, 朱日宏, 程丽君, 王青, 朱应时 2002 红外与激光工程 31 257]
[5]	Ji C, Zhang L Y, Dou S X, Wang P Y 2011 Acta Phys. Sin. 60 098703 (in Chinese) [季超, 张凌云, 窦硕星, 王鹏业 2011 物理学报 60 098703]
[6]	Fan W X, Zhang M, Wang X M 2004 J. Xi’an Univ. Engin. Sci. Technol. 18 160 (in Chinese) [樊文侠, 张敏, 王新明 2004 西安工程科技学院学报 18 160]
[7]	Yan Z G, Lin Y L, Yang J, Li Z H, Bian B M 2012 Acta Phys. Sin. 61 200502 (in Chinese) [闫振纲, 林颖璐, 杨娟, 李振华, 卞保民 2012 物理学报 61 200502]
[8]	Lin Y L, Yan Z G, Yang J, Wang C Y, Bian B M 2012 Acta Phys. Sin. 61 100505 (in Chinese) [林颖璐, 闫振纲, 杨娟, 王春勇, 卞保民 2012 物理学报 61 100505]
[9]	Mesarović V Z, Galatsanos N P, Wernick M N 2000 JOSA A 17 711
[10]	Ni Y C 2009 Shiyong Celiang Buquedingdu Pingding (Beijing: China Metrology Publishing House) p107 (in Chinese) [倪育才 2009 实用测量不确定度评定 (北京: 中国计量出版社) 第107页]

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