级联式平面抛物面型X射线组合折射透镜的设计与制作

付明磊; 乐孜纯; 周寒青; 张明; 全必胜; 王华; 毛成文; 王昌辉; 沈小燕

doi:10.7498/aps.63.194103

摘要

X射线组合折射透镜（CRL）已逐步成为同步辐射光源下X射线聚焦光学器件的标准配件之一，它具有结构紧凑、易调节校准、适用光子能量范围大等优点. 本文设计了一种级联式平面抛物面型CRL，它将N1个具有较大抛物面几何孔径（R0）的折射单元Ⅰ与N2个具有较小抛物面顶点曲率半径（R）的折射单元Ⅱ级联，以解决常规CRL设计过程中焦斑尺寸与透过率的矛盾. 采用PMMA材料，利用LIGA技术制作了一组级联式平面抛物面型CRL，其中折射单元I的主要结构参数为N1=15，R1=200 μm，2R01=564 μm；折射单元Ⅱ的主要结构参数为N2=20，R2=50 μm，2R02=140 μm. 在上海光源同步辐射线束上，所制作的级联式平面抛物面型CRL实现了对初始光斑尺寸为200 μm×100 μm的入射X射线的一维聚焦，测试得到的焦距为1.052 m，横向焦斑尺寸为24.9 μm@8 keV，透过率为2.19%.

关键词:

Abstract

Due to its attractive features such as compact size, simple to align and wide working range of photon energy, the X-ray compound refractive lens (CRL) has gradually become one of the standard accessories to focus the X-ray beams from the synchrotron radiation light source. In this paper, a cascaded planar parabolic CRL is designed and fabricated. The novel CRL is composed of type Ⅰ and type Ⅱ refractive elements in order to achieve a small spot size while maintaining the transmission. In type I refractive element, the parabolic geometry aperture (R0) is large, while, in type Ⅱ refractive element, the radius of curvature (R) at the parabolic vertex is small. So N1 numbers of type I and N2 numbers of type Ⅱ refractive elements are cascaded to form a single-chip CRL. A cascaded X-ray planar parabolic CRL is constructed using PMMA material by means of LIGA techniques. The main structural parameters of type Ⅰ refractive elements are: N1=15, R1=200 μm, 2R01=564 μm. The main structural parameters of type Ⅱ refractive elements are: N2=20, R2=50 μm, 2R02=140 μm. The cascaded planar parabolic CRL is tested on the beam line whose original incident X-ray spot is 200 μm×100 μm at Shanghai synchrotron radiation facility. The measured lateral focusing spot size is 24.9 μm@8 keV, the transmission rate is 2.19% and the focal length is 1.052 m.

Keywords:

作者及机构信息

1.
浙江工业大学理学院, 杭州 310023;

2.
浙江工业大学光学工程研究所, 杭州 310023;

3.
中国科学院上海应用物理研究所, 上海 201204

基金项目: 高等学校博士学科点专项科研基金（批准号：20133317110006）、国家国际科技合作项目（批准号：2012DFR10510）和上海光源用户课题（批准号：09sr0134）资助的课题.

Authors and contacts

1.
College of Science, Zhejiang University of Technology, Hangzhou 310023, China;

2.
Institute of Optical Engineering, Zhejiang University of Technology, Hangzhou 310023, China;

3.
Shanghai Institute of Applied Physics, Shanghai Synchrotron Radiation Facility, Chinese Academy of Sciences, Shanghai 201204, China

Funds: Project supported by the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20133317110006 ), the International Joint Research Program of China(Grant No. 2012DFR10510), and the User Project of Shanghai Synchrotron Radiation Facility, China (Grant No. 09sr0134).

参考文献

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[11]	Zozulya A V, Bondarenko S, Schavkan A, Westermeier F, Grbel G, Sprung M 2012 Opt. Express 20 18967
[12]	Andrejczuk A, Nagamine M, Sakurai Y, Itou M 2014 J. Synchrotron. Radiat 21 57
[13]	Le Z C, Liang J Q, Dong W, Zhu P P, Peng L Q, Wang W B, Huang W X, Yuan Q X, Wang J Y 2007 Chin. Phys. 16 984
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[15]	Le Z C, Zhang M, Dong W, Quan B S, Liu W, Liu K 2010 Acta Phys. Sin. 59 6284(in Chinese) [乐孜纯, 张明, 董文, 全必胜, 刘魏, 刘恺 2010 物理学报 59 6284]
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施引文献

[1]	Cao Z R, Dong J J, Yang Z H, Zhan X Y, Yuan Z, Zhang H Y, Jiang S E, Ding Y K 2013 Acta Phys. Sin. 62 045205(in Chinese) [曹柱荣, 董建军, 杨正华, 詹夏宇, 袁铮, 张海鹰, 江少恩, 丁永坤 2013 物理学报 62 045205]
[2]	Fox O J L, Alianelli L, Malik A M, Pape I, May P W, Sawhney K J S 2014 Opt. Express 22 7657
[3]	Huang Q S, Li H C, Song Z Q, Zhu J T, Wang Z S, Li A G, Yan S, Mao C W, Wang H, Yan F, Zhang L, Yu X H, Liu P, Li M 2013 Chin. Phys. C 37 028002
[4]	Li Y D, Lin X Y, Liu S G, He J L, Guo F, Sun T X, Liu P 2013 Chin. Phys. B 22 044103
[5]	Guilherme A, Buzanich G, Carvalho M L 2012 Spectrochim. Acta. Part B 77 1
[6]	Snigireva I, Snigirev A 2013 Journal of Physics: Conference Series 463 012044
[7]	Ogurreck M, Wilde F, Herzen J, Beckmann F, Nazmov V, Mohr J, Haibel A, Mller M, Schreyer A 2013 Journal of Physics: Conference Series 425 182002
[8]	Guilherme A, Buzanich G, Radtke M, Reinholz U, Coroado J, Dos Santos J M F, Carvalho M L 2012 J. Anal. At. Spectrom 27 966
[9]	Buzanich G, Radtke M, Reinholz U, Riesemeier H, Streli C 2012 J. Anal. At. Spectrom 27 1803
[10]	Vaughan G B M, Wright J P, Bytchkov A, Rossat M, Gleyzolle H, Snigireva I, Snigirev A 2011 J. Synchrotron. Radiat 18 125
[11]	Zozulya A V, Bondarenko S, Schavkan A, Westermeier F, Grbel G, Sprung M 2012 Opt. Express 20 18967
[12]	Andrejczuk A, Nagamine M, Sakurai Y, Itou M 2014 J. Synchrotron. Radiat 21 57
[13]	Le Z C, Liang J Q, Dong W, Zhu P P, Peng L Q, Wang W B, Huang W X, Yuan Q X, Wang J Y 2007 Chin. Phys. 16 984
[14]	Le Z C, Dong W, Liu W, Zhang M, Liang J Q, Quan B S, Liu K, Liang Z Z, Zhu P P, Yin F T, Huang W X 2010 Acta Phys. Sin. 59 1977(in Chinese) [乐孜纯, 董文, 刘魏, 张明, 梁静秋, 全必胜, 刘恺, 梁中翥, 朱佩平, 伊福廷, 黄万霞 2010 物理学报 59 1977]
[15]	Le Z C, Zhang M, Dong W, Quan B S, Liu W, Liu K 2010 Acta Phys. Sin. 59 6284(in Chinese) [乐孜纯, 张明, 董文, 全必胜, 刘魏, 刘恺 2010 物理学报 59 6284]
[16]	Yao Q J 1989 Optical tutorial (Second Edition) (Beijing: Higher Education Press) p210 (in Chinese) [姚启钧1989光学教程(第二版) (北京: 高等教育出版社)第210页]
[17]	Le Z C, Liang J Q 2003 J. Opt. A: Pure & Appl. Opt. 5 374

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