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Measurement of thickness and refractive index of Zn1-xMgxO film grown on sapphire substrate by molecular beam epitaxy

Yan Feng-Ping Zheng Kai Wang Lin Li Yi-Fan Gong Tao-Rong Jian Shui-Sheng K. Ogata K. Koike S. Sasa M. Inoue M. Yano

Measurement of thickness and refractive index of Zn1-xMgxO film grown on sapphire substrate by molecular beam epitaxy

Yan Feng-Ping, Zheng Kai, Wang Lin, Li Yi-Fan, Gong Tao-Rong, Jian Shui-Sheng, K. Ogata, K. Koike, S. Sasa, M. Inoue, M. Yano
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  • Received Date:  27 September 2006
  • Accepted Date:  21 November 2006
  • Published Online:  20 July 2007

Measurement of thickness and refractive index of Zn1-xMgxO film grown on sapphire substrate by molecular beam epitaxy

  • 1. (1)Bio Venture Center,Osaka Institute of Technology; (2)New Material Research Center,Osaka Institute of Technology; (3)New Material Research Center,Osaka Institute of Technology;Bio Venture Center,Osaka Institute of Technology; (4)北京交通大学光波技术研究所,北京 100044; (5)北京交通大学光波技术研究所,北京 100044;New Material Research Center,Osaka Institute of Technology

Abstract: The thickness and refractive index of Zn1-xMgxO film grown on A-sapphire substrate by molecular beam epitaxy were measured by ellipsometry. Combined with Mg content measured by inductively coupled plasma (ICP), the curves showing the relationships of thickness with film growth condition and the refractive index with the Mg content in the film were deduced by numerical analysis, which may serve as a theoretical basis for controlling the thickness and the refractive index in Zn1-xMgxO film growth process.

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