The variations in composition and bonding configuration of SiN<sub><em>x</em></sub> film under high annealing temperature treatment
Acta Physica Sinica
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Acta Phys. Sin  2012, Vol. 61 Issue (1): 016803     doi:10.7498/aps.61.016803
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The variations in composition and bonding configuration of SiNx film under high annealing temperature treatment
Jiang Li-Hua, Zeng Xiang-Bin, Zhang Xiao
Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
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