Acta Physica Sinica
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Acta Phys. Sin  2015, Vol. 64 Issue (3): .     DOI: 10.7498/aps.64.033101
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Effect of oxygen vacancy on lattice and electronic properties of HfO2 by means of density function theory study
Dai Guang-Zhen1 2, Jiang Xian-Wei2, Xu Tai-Long2, Liu Qi3, Chen Jun-Ning2, Dai Yue-Hua2
1. Anhui Provincial Key Lab of Detection and Automation, School of Electrial Engineering, Anhui Polytechnic University, Wuhu 241000, China;
2. Anhui Provincial Key Lab of Integrated Circuit Design, School of Electronics and Information Engineering, Anhui University, Hefei 230601, China;
3. Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China

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