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物理学报. 2010, 59(2): 907-912.
doi: 10.7498/aps.59.907.
用于微型光谱仪的硅基多级微反射镜设计与制作研究
- 收稿日期: 2009-05-06
- 修回日期: 2009-06-23
- 刊出日期: 2010-01-05
English Abstract
Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer
- Received Date:
06 May 2009
- Accepted Date:
23 June 2009
- Published Online:
05 January 2010
Abstract: A micro-spectrometer without moving parts that can be manufactured through micro-opto-electro-mechanical system techniques is developed, and the interference system is introduced. The fabrication of the micro multi-mirrors, which is the core part of the system, is investigated and wet etching of silicon in KOH solution is testified to be a good method. The root mean square surface roughness of the reflect surface made up of Si planes （111） through wet etching is less than 10 nm.
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