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A METHOD TO DETERMINE THE SPECIFIC CONTACT RESISTANCE OF METAL-SEMICONDUCTOR CONTACT——CIRCULAR RING STRUCTURE METHOD

ZHU DE-GUANG WU DING-FEN

A METHOD TO DETERMINE THE SPECIFIC CONTACT RESISTANCE OF METAL-SEMICONDUCTOR CONTACT——CIRCULAR RING STRUCTURE METHOD

ZHU DE-GUANG, WU DING-FEN
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  • Received Date:  04 August 1986
  • Published Online:  05 March 1987

A METHOD TO DETERMINE THE SPECIFIC CONTACT RESISTANCE OF METAL-SEMICONDUCTOR CONTACT——CIRCULAR RING STRUCTURE METHOD

  • 1. 中国科学院上海冶金研究所

Abstract: In this paper, a method to determine the specific contact resistance of metal-semiconductor contact——circular ring structure method is presented. The equations for specific contact resistance which are used to both the definite thick and semiinfinite samples were derived. Some measurements and calculations have been carried out, the results are in good agreement with chose of methods published in the literature.

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