A METHOD TO DETERMINE THE SPECIFIC CONTACT RESISTANCE OF METAL-SEMICONDUCTOR CONTACT——CIRCULAR RING STRUCTURE METHOD

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A METHOD TO DETERMINE THE SPECIFIC CONTACT RESISTANCE OF METAL-SEMICONDUCTOR CONTACT——CIRCULAR RING STRUCTURE METHOD

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ZHU DE-GUANG, WU DING-FEN

Acta Phys. Sin., 1987, 36(6): 752-759.

Abstract
In this paper, a method to determine the specific contact resistance of metal-semiconductor contact——circular ring structure method is presented. The equations for specific contact resistance which are used to both the definite thick and semiinfinite samples were derived. Some measurements and calculations have been carried out, the results are in good agreement with chose of methods published in the literature.
Authors and contacts
ZHU DE-GUANG,

WU DING-FEN

1.
中国科学院上海冶金研究所
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