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DETERMINATION OF AlxGa1-xAs AUGER SENSITIVITY FACTORS

CHEN WEI-DE GUI YU-DE

DETERMINATION OF AlxGa1-xAs AUGER SENSITIVITY FACTORS

CHEN WEI-DE, GUI YU-DE
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Publishing process
  • Received Date:  12 July 1993
  • Published Online:  05 February 1994

DETERMINATION OF AlxGa1-xAs AUGER SENSITIVITY FACTORS

  • 1. 中国科学院半导体研究所和表面物理国家重点实验室,北京100083

Abstract: AlxGa1-xAs Auger sensitivity factors have been determined by using PHI 610 scanning Auger microprobe with pure elemental standards Al, Ag and matrix GaAs. The quantitative results of AlxGa1-xAs measured by the present method are in very good agreement with that by X-ray double crystal measurement. It is shown that by using sensitivity factors obtained from the self-instrument, the accuracy of the quantitative AES analysis can be considerably improved compared with that using elemental relative sensitivity factors given by the PHI handbook or internal standard method.

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