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A traceable calibration method for spectroscopic ellipsometry

Zhang Ji-Tao Li Yan Luo Zhi-Yong

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A traceable calibration method for spectroscopic ellipsometry

Zhang Ji-Tao, Li Yan, Luo Zhi-Yong
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  • Abstract views:  8767
  • PDF Downloads:  1647
  • Cited By: 0
Publishing process
  • Received Date:  08 April 2009
  • Accepted Date:  06 May 2009
  • Published Online:  15 January 2010

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