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The interaction process between 1.06 m wavelength Nd:YAG long pulse laser with a millisecond pulse width and the MOS pixel of frame transfer area CCD image sensor and its hard damage mechanism are studied by the finite element method. The thermal-mechanical coupled modeling for long pulse laser irradiation of a MOS pixel is established, and the distributions of temperature and stress are obtained. The results show that the spallations between O layer and S layer appear due to the S layer radial stress on the surface exceeding the compressive strength under the action of the long pulse laser, then it will extend to the entire layer before melting by radial stress,axial stress and hoop stress. Hard damage of pixel occurs as spallation, and one pixel or an array of pixels in the laser irradiation area of CCD sensor is completely in failure. This paper could provide foundation for both laser-induced damage and protection of CCD image sensor.
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Keywords:
- long pulse laser /
- CCD image sensor /
- hard damage mechanism /
- spallation
[1] Zhang C Z, Blarre L, Walser R M, Becker M F 1993 Appl. Opt. 32 5201
[2] Zhang D Y, Zhao J H, Wang W P, Liu C L, Tang X S 2003 High Power Laser and Particle Beams 15 1050 (in Chinese) [张大勇、赵剑衡、王伟平、刘仓理、唐小松 2003 强激光与粒子束 15 1050]
[3] Guo S F, Cheng X A, Fu X Q, Sun Y Q, Wang F, Li W Y, Zhou Y P, Lu Q S, Wen S C 2007 High Power Laser and Particle Beams 19 1783 (in Chinese) [郭少锋、程湘爱、傅喜泉、孙运强、王 飞、李文煜、周玉平、陆启生、文双春 2007 强激光与粒子束 19 1783]
[4] Ni X W, Lu J, He A Z 1994 Acta Phys. Sin. 43 1795 (in Chinese) [倪晓武、陆 建、贺安之 1994 物理学报 43 1795]
[5] Qiu D D, Zhang Z, Wang R, Jiang T, Cheng X A 2011 Acta Opt. Sin. 31 0214006-1 (in Chinese)[邱冬冬、张 震、王 睿、江 天、程湘爱 2011 光学学报 31 0214006-1]
[6] Qin Y, Chen Y B, Ni X W, Shen Z H, Bi J, Zhang X H 2010 Opt. and Laser. in Engin. 48 361
[7] Wang B, Qin Y, Ni X W, Shen Z H, Lu J 2010 Appl. Opt. 49 5537
[8] Bi J, Zhang X H, Ni X W, Jin G Y, Li C L, Xu L J, Chen Y B 2011 Lasers in Engineering. (in Press)
[9] Pronko P P, VanRompay P A, Horvath C, Loesel F, Juhasz T, Liu X, Mourou G 1998 Phys. Rev. B 58 2387
[10] Kong X Q 1998 The Application of the Finite Element Method in Heat Transfer (Beijing: Science Press) p134 (in Chinese) [孔祥谦 1998 有限单元法在传热学中的应用(北京:科学出版社)第134页]
[11] Chen Y B, Lu J, Ni X W, Bi J, Zhang X H 2008 J. Mater. Proc. Technol. 205 9
[12] Sun C W 2002 The Effect of Laser Irradiation (Beijing: National Defence Industry Press) p10-29 (in Chinese) [孙承纬 2002 激光辐照效应(北京:国防工业出版社)第10-29页]
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[1] Zhang C Z, Blarre L, Walser R M, Becker M F 1993 Appl. Opt. 32 5201
[2] Zhang D Y, Zhao J H, Wang W P, Liu C L, Tang X S 2003 High Power Laser and Particle Beams 15 1050 (in Chinese) [张大勇、赵剑衡、王伟平、刘仓理、唐小松 2003 强激光与粒子束 15 1050]
[3] Guo S F, Cheng X A, Fu X Q, Sun Y Q, Wang F, Li W Y, Zhou Y P, Lu Q S, Wen S C 2007 High Power Laser and Particle Beams 19 1783 (in Chinese) [郭少锋、程湘爱、傅喜泉、孙运强、王 飞、李文煜、周玉平、陆启生、文双春 2007 强激光与粒子束 19 1783]
[4] Ni X W, Lu J, He A Z 1994 Acta Phys. Sin. 43 1795 (in Chinese) [倪晓武、陆 建、贺安之 1994 物理学报 43 1795]
[5] Qiu D D, Zhang Z, Wang R, Jiang T, Cheng X A 2011 Acta Opt. Sin. 31 0214006-1 (in Chinese)[邱冬冬、张 震、王 睿、江 天、程湘爱 2011 光学学报 31 0214006-1]
[6] Qin Y, Chen Y B, Ni X W, Shen Z H, Bi J, Zhang X H 2010 Opt. and Laser. in Engin. 48 361
[7] Wang B, Qin Y, Ni X W, Shen Z H, Lu J 2010 Appl. Opt. 49 5537
[8] Bi J, Zhang X H, Ni X W, Jin G Y, Li C L, Xu L J, Chen Y B 2011 Lasers in Engineering. (in Press)
[9] Pronko P P, VanRompay P A, Horvath C, Loesel F, Juhasz T, Liu X, Mourou G 1998 Phys. Rev. B 58 2387
[10] Kong X Q 1998 The Application of the Finite Element Method in Heat Transfer (Beijing: Science Press) p134 (in Chinese) [孔祥谦 1998 有限单元法在传热学中的应用(北京:科学出版社)第134页]
[11] Chen Y B, Lu J, Ni X W, Bi J, Zhang X H 2008 J. Mater. Proc. Technol. 205 9
[12] Sun C W 2002 The Effect of Laser Irradiation (Beijing: National Defence Industry Press) p10-29 (in Chinese) [孙承纬 2002 激光辐照效应(北京:国防工业出版社)第10-29页]
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