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Considering the fact that the GaAs has the characteristics of thermal decomposition, the thermal decomposition damage to GaAs surface, induced by a 532 nm wavelength long pulse laser with a millisecond pulse width is studied by the heat conduction theoretical and semi-analytical method. First, the calculation models of two-dimensional axisymmetric transient temperature field and the surface thermal decomposition damage threshold for long pulse laser irradiation of GaAs are established, and the transient temperature fields and the thermal decomposition damage thresholds in GaAs with different absorption rates are simulated. The results show that the higher absorption rate causes the higher temperature rise on the surface of material, but the required decomposition damage energy density is lower. With the increase of laser energy density, the decomposition damage occurs more early. This paper has guiding significance and practical value for investigating the interaction between long pulse laser and GaAs and its damage mechanism.
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Keywords:
- long pulse laser /
- thermal decomposition damage /
- semi-analytical method /
- GaAs
[1] Qi H F, Wang Q P, Li Y F, Zhang X Y, Liu Z J, Wang Y R, Zhang S S, Xia W, Jin G F 2007 Appl. Sur. Sci. 254 1373
[2] Qi H F, Wang Q P , Zhang X Y, Liu Z J, Liu Z J, Chang J, Xia W, Jin G F 2008 J. Appl. Phys. 103 033106
[3] Garg A, Kapoor A, Tripathi K N 2003 Optics & Laser Technology 35 21
[4] Kuanr A V, Bansal S K, Srivastava G P 1996 Optics & Laser Technology 28 25
[5] Lv G H, Man B Y, Zhang Y H, Liu A H, Zhang Q G 2004 OPTIK 115 347
[6] Trelenberg T W, Dinh L N, Saw C K, Stuart B C, Balooch M 2004 Applied Surface Science 221 364
[7] Srivastava P K, Singh A P, Kapoor A 2006 Optics & Laser Technology 38 649
[8] Bi J, Zhang X H, Ni X W 2007 Proceedings of SPIE 6839 683926
[9] Qin Y, Chen Y B, Ni X W, Shen Z H, Bi J, Zhang X H 2010 Optics and Lasers in Engineering 48 361
[10] Wang B, Qin Y, Ni X W, Shen Z H, Lu J 2010 Applied Optics 49 5537
[11] Liu J, Lu J, Ni X W, Dai G, Chen Y B 2010 Chinese Journal of lasers 37 1398 (in Chinese) [刘剑, 陆建, 倪晓武, 戴罡, 陈彦北 2010 中国激光 37 1398]
[12] Bi J, Zhang X H, Ni X W 2011 Acta Phys. Sin. 60 114210 (in Chinese) [毕娟, 张喜和, 倪晓武 2011 物理学报 60 114210]
[13] Bi J, Zhang X H, Ni X W, Jin G Y, Li C L, Xu L J, Chen Y B 2012 Lasers in Engineering 22 37
[14] Ozisik M N (Translated by Yu C M) 1983 Heat conduction (Beijing: Higher Education Press) pp7-8 (in Chinese) [奥奇西克 M N著, 俞昌铭译 1983 热传导 (北京: 高等教育出版社) 第7—8页]
[15] Gospavic R, Sreckovic M, Popov V 2004 Mathematics and Computers in Simulation 65 211
[16] Press W H, Flannery B P, Teukolsky S A, Vetterling W T 1992 Numerical Recipes in FORTRAN 77 (Cambridge University Press)
[17] Meyer J R, Kruer M R, Bartoli F J 1980 J. Appl. Phys. 51 5513
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[1] Qi H F, Wang Q P, Li Y F, Zhang X Y, Liu Z J, Wang Y R, Zhang S S, Xia W, Jin G F 2007 Appl. Sur. Sci. 254 1373
[2] Qi H F, Wang Q P , Zhang X Y, Liu Z J, Liu Z J, Chang J, Xia W, Jin G F 2008 J. Appl. Phys. 103 033106
[3] Garg A, Kapoor A, Tripathi K N 2003 Optics & Laser Technology 35 21
[4] Kuanr A V, Bansal S K, Srivastava G P 1996 Optics & Laser Technology 28 25
[5] Lv G H, Man B Y, Zhang Y H, Liu A H, Zhang Q G 2004 OPTIK 115 347
[6] Trelenberg T W, Dinh L N, Saw C K, Stuart B C, Balooch M 2004 Applied Surface Science 221 364
[7] Srivastava P K, Singh A P, Kapoor A 2006 Optics & Laser Technology 38 649
[8] Bi J, Zhang X H, Ni X W 2007 Proceedings of SPIE 6839 683926
[9] Qin Y, Chen Y B, Ni X W, Shen Z H, Bi J, Zhang X H 2010 Optics and Lasers in Engineering 48 361
[10] Wang B, Qin Y, Ni X W, Shen Z H, Lu J 2010 Applied Optics 49 5537
[11] Liu J, Lu J, Ni X W, Dai G, Chen Y B 2010 Chinese Journal of lasers 37 1398 (in Chinese) [刘剑, 陆建, 倪晓武, 戴罡, 陈彦北 2010 中国激光 37 1398]
[12] Bi J, Zhang X H, Ni X W 2011 Acta Phys. Sin. 60 114210 (in Chinese) [毕娟, 张喜和, 倪晓武 2011 物理学报 60 114210]
[13] Bi J, Zhang X H, Ni X W, Jin G Y, Li C L, Xu L J, Chen Y B 2012 Lasers in Engineering 22 37
[14] Ozisik M N (Translated by Yu C M) 1983 Heat conduction (Beijing: Higher Education Press) pp7-8 (in Chinese) [奥奇西克 M N著, 俞昌铭译 1983 热传导 (北京: 高等教育出版社) 第7—8页]
[15] Gospavic R, Sreckovic M, Popov V 2004 Mathematics and Computers in Simulation 65 211
[16] Press W H, Flannery B P, Teukolsky S A, Vetterling W T 1992 Numerical Recipes in FORTRAN 77 (Cambridge University Press)
[17] Meyer J R, Kruer M R, Bartoli F J 1980 J. Appl. Phys. 51 5513
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