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The rigorous coupled-wave analysis technique for describing the diffraction of metal multi-layer diffraction grating (MMDG) is built. Formulation for a stable and efficient numerical implementation of diffraction efficiency is presented for MMDG with TE polarization. With the merit function of the -1 order diffraction efficiency higher than 97% and working bandwidth, the parameters of MMDG are optimized to achieve broadband. The bandwidths used for 800 nm and 1053 nm can be 130 nm and 150 nm respectively. The manufacture latitude and the effective incident angle for the optimized structure of MMDG are discussed. The optimized grating should be useful for chirped pulse compress.
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Keywords:
- diffraction efficiency /
- metal multi-layer dielectric grating /
- rigorous coupled-wave analysis
[1] Wang C, Leng Y X, Liang X Y, Zhang C M, Xu Z Z 2005 Chin. Phys. Lett. 22 3091
[2] Koichi Y K, Barty C P 2003 Opt. Lett. 28 2402
[3] Boyd R D, Britten J A, Decker D E 1995 Appl. Opt. 34 169
[4] Liu S J, Shen J, Shen Z C, Kong W J, Wei C Y, Jin Y X, Shao J D, Fan Z X 2006 Acta Phys. Sin. 55 4588 (in Chinese) [刘世杰、沈 健、沈自才、孔伟金、魏朝阳、晋云霞、邵建达、范正修 2006 物理学报 55 4588]
[5] Perry M D, Boyd R D, Britten J A, Decker D, Shore B W, Shannon C 1995 Opt. Lett. 20 940
[6] Kong W J, Yun M J, Sun X, Liu J H, Fan Z X, Shao J D 2008 Acta Phys. Sin. 57 4904 (in Chinese)[孔伟金、云茂金、孙 欣、刘均海、范正修、邵建达 2008 物理学报 57 4904]
[7] Kong W J, Liu S J, Shen J, Shen Z C, Shao J D, Fan Z X 2006 Acta Phys. Sin. 55 1143 (in Chinese) [孔伟金、刘世杰、沈 健、沈自才、邵建达、范正修 2006 物理学报 55 1143]
[8] Palmier S, Neauport J, Baclet N, Lavastre E, Dupuy G 2009 Opt. Express. 17 20430
[9] Wang J P, Jin Y X, Shao J D, Fan Z X 2010 Opt. Lett. 35 187
[10] Neauport J, Bonod N, Hocque S, Palmier S, Dupuy G 2010 Opt. Express. 18 23776
[11] Canova F, Uteza O, Chambaret J P, Flury M, Tonchev S, Fechner R 2007 Opt. Express. 15 15324
[12] Wang J P, Jin Y X, Ma J Y, Shao J D, Fan Z X 2010 Appl. Opt. 49 2969
[13] Moharam M G, Gaylord T K 1986 J. Opt. Soc. Am. A 3 1780
[14] Moharam M G, Gaylord T K 1981 Appl. Opt. 20 240
[15] Moharam M G, Eric B G, Drew A P 1995 J. Opt. Soc. Am. A 12 1068
[16] Moharam M G, Drew A P, Eric B G 1995 J. Opt. Soc. Am. A 12 1077
[17] Kong W J, Shen Z C, Shen J, Shao J D, Fan Z X 2005 Optik 116 325
[18] Wei H B, Li L F 2003 Appl. Opt. 42 6255
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[1] Wang C, Leng Y X, Liang X Y, Zhang C M, Xu Z Z 2005 Chin. Phys. Lett. 22 3091
[2] Koichi Y K, Barty C P 2003 Opt. Lett. 28 2402
[3] Boyd R D, Britten J A, Decker D E 1995 Appl. Opt. 34 169
[4] Liu S J, Shen J, Shen Z C, Kong W J, Wei C Y, Jin Y X, Shao J D, Fan Z X 2006 Acta Phys. Sin. 55 4588 (in Chinese) [刘世杰、沈 健、沈自才、孔伟金、魏朝阳、晋云霞、邵建达、范正修 2006 物理学报 55 4588]
[5] Perry M D, Boyd R D, Britten J A, Decker D, Shore B W, Shannon C 1995 Opt. Lett. 20 940
[6] Kong W J, Yun M J, Sun X, Liu J H, Fan Z X, Shao J D 2008 Acta Phys. Sin. 57 4904 (in Chinese)[孔伟金、云茂金、孙 欣、刘均海、范正修、邵建达 2008 物理学报 57 4904]
[7] Kong W J, Liu S J, Shen J, Shen Z C, Shao J D, Fan Z X 2006 Acta Phys. Sin. 55 1143 (in Chinese) [孔伟金、刘世杰、沈 健、沈自才、邵建达、范正修 2006 物理学报 55 1143]
[8] Palmier S, Neauport J, Baclet N, Lavastre E, Dupuy G 2009 Opt. Express. 17 20430
[9] Wang J P, Jin Y X, Shao J D, Fan Z X 2010 Opt. Lett. 35 187
[10] Neauport J, Bonod N, Hocque S, Palmier S, Dupuy G 2010 Opt. Express. 18 23776
[11] Canova F, Uteza O, Chambaret J P, Flury M, Tonchev S, Fechner R 2007 Opt. Express. 15 15324
[12] Wang J P, Jin Y X, Ma J Y, Shao J D, Fan Z X 2010 Appl. Opt. 49 2969
[13] Moharam M G, Gaylord T K 1986 J. Opt. Soc. Am. A 3 1780
[14] Moharam M G, Gaylord T K 1981 Appl. Opt. 20 240
[15] Moharam M G, Eric B G, Drew A P 1995 J. Opt. Soc. Am. A 12 1068
[16] Moharam M G, Drew A P, Eric B G 1995 J. Opt. Soc. Am. A 12 1077
[17] Kong W J, Shen Z C, Shen J, Shao J D, Fan Z X 2005 Optik 116 325
[18] Wei H B, Li L F 2003 Appl. Opt. 42 6255
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