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Stress distribution of optical materials can be measured by using the laser feedback effect. Owing to the non-linear movement of the feedback mirror, the result accuracy of the system will decrease. In this work, we measure the displacement of the feedback mirror by using a high precision quasi-common-path laser feedback interferometry. The displacement-time function is obtained by a high-end fitting method. The stress measurement error induced by the non-linear movement of the feedback mirror is calculated according to the displacement-time function and a three-mirror cavity equivalent model, and the correction for the system accuracy is achieved. The results show that the different movement direction of the feedback mirror gives rise to an opposite variation trend of error. Measurement error can be reduced by averaging the results in different directions. In the study we analyze the influence of the non-linear movement of the feedback mirror on the measurement accuracy, and a method of improving the error is proposed. This method is significant for correcting the measurement results and improving the accuracy.
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Keywords:
- laser feedback /
- nonlinear correction /
- displacement measurement
[1] Huang W B, Deng S P, Liu Y G, Peng Z H, Yao L S, Xuan L 2012 Acta Phys. Sin. 61 094208 (in Chinese) [黄文彬, 邓舒鹏, 刘永刚, 彭增辉, 姚丽双, 宣丽 2012 物理学报 61 094208]
[2] Gao Y H, Xu X S 2014 Chin. Phys. B 23 114205
[3] Cao Y, Li R M, Tong Z R 2013 Acta Phys. Sin. 62 084215 (in Chinese) [曹晔, 李荣敏, 童峥嵘 2013 物理学报 62 084215]
[4] Wang P 2011 M. S. Dissertation (Nanjing: Nanjing University of Science and Technology) (in Chinese) [王苹 2011 硕士学位论文(南京: 南京理工大学)]
[5] Kikuta H, Ohira Y, Iwata K 1997 Appl. Opt. 36 1566
[6] Peng H J, Wong S P, Liu X H, Lai Y W, Ho H P, Zhao S N 2003 Proc. SPIE 5144 659
[7] Wang B, Hellman W 2001 Rev. Sci. Instrum. 72 4066
[8] Liu H P, Lu F, Wang X L, Yang T L, L Y B, Li Y H, Liu X Z, Zhang R F, Song Q, Ma X J 2008 Chin. Phys. Lett. 25 156
[9] Zhang J T, Li Y, Luo Z Y 2010 Acta Phys. Sin. 59 186 (in Chinese) [张继涛, 李岩, 罗志勇 2010 物理学报 59 186]
[10] Wu Y, Zhang P, Chen W X, Tan Y D 2013 Chin. Phys. B 22 124205
[11] Tan Y D, Zhang S L 2007 Appl. Phys. B 89 339
[12] Wan X J 2007 Ph. D. Dissertation (Beijing: Tsinghua University) (in Chinese) [万新军 2007 博士学位论文(北京: 清华大学)]
[13] Wan X J, Li D, Zhang S L 2007 Opt. Lett. 32 367
[14] Yu D R, Bao W, Xu M Q 1995 J. Harbin Inst. Technol. 27 84 (in Chinese) [于达仁, 鲍文, 徐敏强 1995 哈尔滨工业大学学报 27 84]
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[1] Huang W B, Deng S P, Liu Y G, Peng Z H, Yao L S, Xuan L 2012 Acta Phys. Sin. 61 094208 (in Chinese) [黄文彬, 邓舒鹏, 刘永刚, 彭增辉, 姚丽双, 宣丽 2012 物理学报 61 094208]
[2] Gao Y H, Xu X S 2014 Chin. Phys. B 23 114205
[3] Cao Y, Li R M, Tong Z R 2013 Acta Phys. Sin. 62 084215 (in Chinese) [曹晔, 李荣敏, 童峥嵘 2013 物理学报 62 084215]
[4] Wang P 2011 M. S. Dissertation (Nanjing: Nanjing University of Science and Technology) (in Chinese) [王苹 2011 硕士学位论文(南京: 南京理工大学)]
[5] Kikuta H, Ohira Y, Iwata K 1997 Appl. Opt. 36 1566
[6] Peng H J, Wong S P, Liu X H, Lai Y W, Ho H P, Zhao S N 2003 Proc. SPIE 5144 659
[7] Wang B, Hellman W 2001 Rev. Sci. Instrum. 72 4066
[8] Liu H P, Lu F, Wang X L, Yang T L, L Y B, Li Y H, Liu X Z, Zhang R F, Song Q, Ma X J 2008 Chin. Phys. Lett. 25 156
[9] Zhang J T, Li Y, Luo Z Y 2010 Acta Phys. Sin. 59 186 (in Chinese) [张继涛, 李岩, 罗志勇 2010 物理学报 59 186]
[10] Wu Y, Zhang P, Chen W X, Tan Y D 2013 Chin. Phys. B 22 124205
[11] Tan Y D, Zhang S L 2007 Appl. Phys. B 89 339
[12] Wan X J 2007 Ph. D. Dissertation (Beijing: Tsinghua University) (in Chinese) [万新军 2007 博士学位论文(北京: 清华大学)]
[13] Wan X J, Li D, Zhang S L 2007 Opt. Lett. 32 367
[14] Yu D R, Bao W, Xu M Q 1995 J. Harbin Inst. Technol. 27 84 (in Chinese) [于达仁, 鲍文, 徐敏强 1995 哈尔滨工业大学学报 27 84]
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