A study of Raman and optical emission spectroscopy on microcrystalline silicon films deposited by VHF-PECVD
Acta Physica Sinica
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Acta Phys. Sin.  2005, Vol. 54 Issue (1): 445-449    
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A study of Raman and optical emission spectroscopy on microcrystalline silicon films deposited by VHF-PECVD
Zhang Xiao-Dan, Zhao Ying, Zhu Feng, Wei Chang-Chun, Wu Chun-Ya, Gao Yan-Tao, Hou Guo-Fu, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen
南开大学光电子所,天津 300071
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