Studies on surface roughness and growth mechanisms of microcrystalline silicon films by grazing incidence X-ray reflectivity
Acta Physica Sinica
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Acta Phys. Sin.  2007, Vol. 56 Issue (4): 2422-2427    
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search  |   
Studies on surface roughness and growth mechanisms of microcrystalline silicon films by grazing incidence X-ray reflectivity
Zhou Bing-Qing1, Wu Zhong-Hua2, Chen Xing2, Liu Feng-Zhen3, Zhu Mei-Fang3, Zhou Yu-Qin3
(1)内蒙古师范大学物理与电子信息学院,呼和浩特 010022; (2)中国科学院高能物理研究所北京同步辐射实验室,北京 100049; (3)中国科学院研究生院物理科学学院,北京 100049
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