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The reflectivity measurement of the 28.5nm multilayer mirror

Huang Wen-Zhong Li Yin-Jun Gu Yu-Qiu Zhang Jie You Yong-Lu CunYu Shutai He Ying-Ling Lei An-Le Chen Cheng-Lin Ma Yue-Yin Jin Chun-Sui

Citation:

The reflectivity measurement of the 28.5nm multilayer mirror

Huang Wen-Zhong, Li Yin-Jun, Gu Yu-Qiu, Zhang Jie, You Yong-Lu, CunYu Shutai, He Ying-Ling, Lei An-Le, Chen Cheng-Lin, Ma Yue-Yin, Jin Chun-Sui
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  • Abstract views:  7646
  • PDF Downloads:  686
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Publishing process
  • Received Date:  18 December 2001
  • Accepted Date:  12 September 2002
  • Published Online:  05 February 2003

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