纳秒激光烧蚀铝材料的二维数值模拟

张朋波; 秦颖; 赵纪军; 温斌

doi:10.7498/aps.59.7120

摘要

为了探索纳秒脉冲强激光与材料的相互作用机理,建立了二维数值模型,利用有限差分法对纳秒激光脉冲烧蚀金属铝的温度场进行了数值模拟.通过对比不同脉宽、光斑和能量下激光引起的温度场随时间的演化,发现脉冲的前期温度升高比后期快.等温图显示中心温度升高最快,烧蚀轮廓与激光束形状相似,烧蚀深度达1—5 μm.脉宽越长,烧蚀越窄和越深,光斑越大,烧蚀越宽和越浅.数值研究表明,1)激光的脉冲形状、脉宽和功率密度直接影响烧蚀的形状和深度,2)激光功率密度在109 W/cm2量级烧蚀

关键词:

Abstract

To investigate the interaction between high-power pulsed laser and metal materials,we established a two-dimensional numerical model. The laser-induced two-dimensional temperature distribution was simulated using a finite difference method. From comparison of temperature evolution under different pulse time,spot sizes and energies,it can be seen that the rise of temperature in the initial period is faster than that in the later periods. Isothermal diagram shows that the temperature rising rate is fastest in the center of laser irradiating zone and that the ablation depth is in the range of 1—5 μm. As the laser pulse duration becomes longer,the ablation zone becomes narrower and deeper. As the laser spot diameter increases,the ablation zone becomes wider and shallower. The present numerical results indicate that: (1) the ablation shape and depth sensitively depend on the laser shape,pulse duration and power density, (2) with laser power density in the order of 109 W/cm2,the ablation area is roughly of the orgc of the laser spot. These results are helpful for designing relevant laser parameters in experiments.

Keywords:

作者及机构信息

(1)大连理工大学材料科学与工程学院,大连 116024; (2)大连理工大学三束材料改性教育部重点实验室和高科技研究院,大连 116024; (3)大连理工大学三束材料改性教育部重点实验室和高科技研究院,大连 116024,大连理工大学材料科学与工程学院,大连 116024

基金项目: 国家自然科学基金(批准号: 10875021)资助的课题.

Authors and contacts

(1)Laboratory of Materials Modification by Laser, Electron, and Ion Beams and College of Advanced Science and Technology, Dalian University of Technology, Dalian 116024, China; (2)Laboratory of Materials Modification by Laser, Electron, and Ion Beams and College of Advanced Science and Technology, Dalian University of Technology, Dalian 116024, China, School of Materials Science and Engineering, Dalian University of Technology, Dal; (3)School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China

参考文献

[1]	Ready J F 1965 J. Appl. Phys. 36 462
[2]	Chan C L, Mazumder J 1987 J. Appl. Phys. 62 4579
[3]	Phys. Rev. Lett. 61 2364
[4]	Milchberg H M, Freeman R R, Davey S C, More R M 1988
[5]	Aden M, Beyer E, Herziger G, Kunze H 1992 J. Phys. D: Appl. Phys. 25 57
[6]	Yilbas B S, Yilbas Z, Akcakoyun N 1996 Opt. Laser Technol. 28 503
[7]	Zhang D M, Li Z H, Huang M T, Zhang M J, Guan L, Zou M Q, Zhong Z C 2001 Acta Phys. Sin. 50 914 (in Chinese) [张端明、李智华、黄明涛、张美军、关丽、邹明清、钟志成 2001物理学报 50 914]
[8]	Zheng R L, Chen H, Liu J 2002 Acta Phys. Sin. 51 0554 (in Chinese) [郑瑞伦、陈洪、刘俊2002 物理学报 51 0554]
[9]	Xu H Y, Zhang Y C, Song Y Q, Chen D Y 2004 Chin. Phys. 13 1758
[10]	Zhang K Y 2004 Acta Phys. Sin. 53 1815 (in Chinese) [张可言 2004 物理学报 53 1815]
[11]	Cheng J X, Zheng Z J, Chen H S, Miao W Y, Chen B, Wang Y M, Hu X 2004 Acta Phys. Sin. 53 3419 (in Chinese) [成金秀、郑志坚、陈红素、缪文勇、陈波、王耀梅、胡昕 2004 物理学报 53 3419]
[12]	Niu Y X, Huang F, Duan X F, Wang Y F, Zhang P, He C J, Yu Y, Yao J Q 2005 Acta Phys. Sin. 54 4816 (in Chinese) [牛燕雄、黄峰、段晓峰、汪岳峰、张鹏、何琛娟、禹晔、姚建铨 2005 物理学报 54 4816]
[13]	Zhang H Y, Wu S G 2007 Acta Phys. Sin. 56 5314 (in Chinese) [张红鹰、吴师岗 2007 物理学报 56 5314]
[14]	Kar A, Mazumder J 1990 J. Appl. Phys. 68 3884
[15]	Watson S, Field J E 2000 J. Phys. D: Appl. Phys. 33 170
[16]	Ni X C, Wang Q Y 2004 Chin. J. Laser. 31 277 (in Chinese) [倪晓昌、王清月 2004 中国激光 31 277]
[17]	Zhang D M, Hou S P, Guan L, Zhong Z C, Li Z H, Yang F X, Zheng K Y 2004 Acta Phys. Sin. 53 2237 (in Chinese) [张端明、侯思普、关丽、钟志成、李智华、杨凤霞、〖17] Zhang D M, Li L, Li Z H, Guan L, Hou S P, Tan X Y 2005 Acta Phys. Sin. 54 1283 (in Chinese) [张端明、李莉、李智华、关丽、侯思普、谭新玉 2005 物理学报 54 1283]
[18]	Tan X Y, Zhang D M, Li Z H, Guan L, Li L 2005 Acta Phys. Sin. 54 3915 (in Chinese) [谭新玉、张端明、李智华、关丽、李莉 2005 物理学报 54 3915]
[19]	Zhan M Q, Shao J D 2008 J. Phys. D: Appl. Phys. 41 045306
[20]	Liu M Q, Li B C 2008 Acta Phys. Sin. 57 3402 (in Chinese) [刘明强、李斌成 2008 物理学报 57 3402]
[21]	Sun C W 2002 Laser Irradiation Effects (Beijing: Defense Industry Press) pp7—18, pp21—22 (in Chinese) [孙承伟 2002 激光辐照效应 (北京: 国防工业出版社) 第7—18、第21—22页]
[22]	Colvin J D, Ault E R, King W E, Zimmerman I H 2003 Phys. Plasma. 10 2940
[23]	Nowakowski K A 2005 Ph. D. Dissertation (Worcester: Worcester Polytechnic Institute) p104, p322
[24]	Johnston A H 1993 Trans. Nucl. Sci. 40 1694
[25]	Yilbas B S, Mansour S B 2007 Int. J. Therm. Sci. 46 385
[26]	Solana P, Kapadia P, Dowden J M, Marsden P J 1999 J. Phys. D: Appl. Phys. 32 942
[27]	Peaceman D W, Rachford H H 1955 J. Soc. Ind. Appl. Math. 3 28
[28]	Qin Y, Wu A M, Zou J X, Liu Y, Wand X G, Dong C 2003 Trans. Mater. Heat Treat. 24 85 (in Chinese) [秦颖、吴爱民、邹建新、刘悦、王晓刚、董闯 2003 材料热处理学报 24 85]

施引文献

[1]	Ready J F 1965 J. Appl. Phys. 36 462
[2]	Chan C L, Mazumder J 1987 J. Appl. Phys. 62 4579
[3]	Phys. Rev. Lett. 61 2364
[4]	Milchberg H M, Freeman R R, Davey S C, More R M 1988
[5]	Aden M, Beyer E, Herziger G, Kunze H 1992 J. Phys. D: Appl. Phys. 25 57
[6]	Yilbas B S, Yilbas Z, Akcakoyun N 1996 Opt. Laser Technol. 28 503
[7]	Zhang D M, Li Z H, Huang M T, Zhang M J, Guan L, Zou M Q, Zhong Z C 2001 Acta Phys. Sin. 50 914 (in Chinese) [张端明、李智华、黄明涛、张美军、关丽、邹明清、钟志成 2001物理学报 50 914]
[8]	Zheng R L, Chen H, Liu J 2002 Acta Phys. Sin. 51 0554 (in Chinese) [郑瑞伦、陈洪、刘俊2002 物理学报 51 0554]
[9]	Xu H Y, Zhang Y C, Song Y Q, Chen D Y 2004 Chin. Phys. 13 1758
[10]	Zhang K Y 2004 Acta Phys. Sin. 53 1815 (in Chinese) [张可言 2004 物理学报 53 1815]
[11]	Cheng J X, Zheng Z J, Chen H S, Miao W Y, Chen B, Wang Y M, Hu X 2004 Acta Phys. Sin. 53 3419 (in Chinese) [成金秀、郑志坚、陈红素、缪文勇、陈波、王耀梅、胡昕 2004 物理学报 53 3419]
[12]	Niu Y X, Huang F, Duan X F, Wang Y F, Zhang P, He C J, Yu Y, Yao J Q 2005 Acta Phys. Sin. 54 4816 (in Chinese) [牛燕雄、黄峰、段晓峰、汪岳峰、张鹏、何琛娟、禹晔、姚建铨 2005 物理学报 54 4816]
[13]	Zhang H Y, Wu S G 2007 Acta Phys. Sin. 56 5314 (in Chinese) [张红鹰、吴师岗 2007 物理学报 56 5314]
[14]	Kar A, Mazumder J 1990 J. Appl. Phys. 68 3884
[15]	Watson S, Field J E 2000 J. Phys. D: Appl. Phys. 33 170
[16]	Ni X C, Wang Q Y 2004 Chin. J. Laser. 31 277 (in Chinese) [倪晓昌、王清月 2004 中国激光 31 277]
[17]	Zhang D M, Hou S P, Guan L, Zhong Z C, Li Z H, Yang F X, Zheng K Y 2004 Acta Phys. Sin. 53 2237 (in Chinese) [张端明、侯思普、关丽、钟志成、李智华、杨凤霞、〖17] Zhang D M, Li L, Li Z H, Guan L, Hou S P, Tan X Y 2005 Acta Phys. Sin. 54 1283 (in Chinese) [张端明、李莉、李智华、关丽、侯思普、谭新玉 2005 物理学报 54 1283]
[18]	Tan X Y, Zhang D M, Li Z H, Guan L, Li L 2005 Acta Phys. Sin. 54 3915 (in Chinese) [谭新玉、张端明、李智华、关丽、李莉 2005 物理学报 54 3915]
[19]	Zhan M Q, Shao J D 2008 J. Phys. D: Appl. Phys. 41 045306
[20]	Liu M Q, Li B C 2008 Acta Phys. Sin. 57 3402 (in Chinese) [刘明强、李斌成 2008 物理学报 57 3402]
[21]	Sun C W 2002 Laser Irradiation Effects (Beijing: Defense Industry Press) pp7—18, pp21—22 (in Chinese) [孙承伟 2002 激光辐照效应 (北京: 国防工业出版社) 第7—18、第21—22页]
[22]	Colvin J D, Ault E R, King W E, Zimmerman I H 2003 Phys. Plasma. 10 2940
[23]	Nowakowski K A 2005 Ph. D. Dissertation (Worcester: Worcester Polytechnic Institute) p104, p322
[24]	Johnston A H 1993 Trans. Nucl. Sci. 40 1694
[25]	Yilbas B S, Mansour S B 2007 Int. J. Therm. Sci. 46 385
[26]	Solana P, Kapadia P, Dowden J M, Marsden P J 1999 J. Phys. D: Appl. Phys. 32 942
[27]	Peaceman D W, Rachford H H 1955 J. Soc. Ind. Appl. Math. 3 28
[28]	Qin Y, Wu A M, Zou J X, Liu Y, Wand X G, Dong C 2003 Trans. Mater. Heat Treat. 24 85 (in Chinese) [秦颖、吴爱民、邹建新、刘悦、王晓刚、董闯 2003 材料热处理学报 24 85]

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