基于近场光学的微球超分辨显微效应

周锐; 吴梦雪; 沈飞; 洪明辉

doi:10.7498/aps.66.140702

摘要

在光学成像领域，由于受到衍射极限的限制，常规成像分辨率在200 nm左右.科学的不断进步对更高分辨率有着迫切需求，如何突破这个极限来获得更高质量的高分辨率图像是热门研究领域.2011年提出了微球超显微技术：在原有的光学系统中，将直径几微米至几十微米的透明微球直接置于样品表面，就能够成倍提高传统光学显微镜的成像能力.微球超显微技术以其简单直接的特点，受到广泛关注.本文介绍了光学显微镜的研究背景以及国内外团队在微球超分辨显微技术方面的研究进展，包括通过在微球表面进行环刻同心环、中心遮挡和表面涂覆的方法来调节微球所产生的光子纳米喷射方面所开展的一系列研究，并进行了理论模拟和实验验证，进一步提升了微球的超分辨显微效应.最后，展望了今后微球超分辨显微技术的应用与发展方向.

关键词:

Abstract

In the field of optical imaging, the conventional imaging resolution is about 200 nm due to the diffraction limit. The higher resolution is urgently needed for further developing scientific research. Therefore, how to break through this limitation to acquire high quality and high resolution image has become a hot research topic. The microspheres with the size of tens of micrometers exhibit the ability to improve the imaging resolution of the conventional optical microscope by locating them directly on the sample surface. Due to its simplicity, the microsphere optical nanoscope technology is widely studied. This paper introduces the research background of the optical microscope and the research progress of microsphere optical nanoscope technology. At the same time, approaches to adjusting the photonic nanojet generated by the microspheres by fabricating concentric ringing, central mask, and surface coating of microspheres are reviewed. The possible reasons for this improved resolution are discussed. The applications and development of the microsphere ultra-microscopic technology in the future are discussed.

Keywords:

作者及机构信息

1.
厦门大学航空航天学院, 厦门 361005;

2.
新加坡国立大学电机工程系, 新加坡 117576

通信作者: 周锐, rzhou2@xmu.edu.cn;elehmh@nus.edu.sg ; 洪明辉, rzhou2@xmu.edu.cn;elehmh@nus.edu.sg

基金项目: 国家重点基础研究发展计划（批准号：2013CBA01703）、国家自然科学基金（批准号：61605162）、福建省自然科学基金（批准号：2017J05106）、中国科学院光电技术研究所微细加工光学技术国家重点实验室开放课题（KFS4）和福建省高端装备制造协同创新中心资助的课题.

Authors and contacts

1.
School of Aerospace Engineering, Xiamen University, Xiamen 361005, China;

2.
Department of Electronics and Computer Engineering, National University of Singapore, Singapore 117576, Singapore

Corresponding author: Zhou Rui, rzhou2@xmu.edu.cn;elehmh@nus.edu.sg ; Hong Ming-Hui, rzhou2@xmu.edu.cn;elehmh@nus.edu.sg

Funds: Project supported by the National Basic Research Program of China (Grant No. 2013CBA01703), the National Natural Science Foundation of China (Grant No. 61605162), the Natural Science Foundation of Fujian Province of China (Grant No. 2017J05106), the State Key Laboratory of Optical Technology for Microfabrication of Institute of Optics and Electronics the Chinese Academy of Sciences (KFS4), and the Collaborative Innovation Center of High-End Equipment Manufacturing in Fujian, China.

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[69]	Wu M, Chen R, Soh J, Shen Y, Jiao L, Wu J, Chen X, Ji R, Hong M 2016 Sci. Rep. 6 31637
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[73]	Bennett, Harold E 1988 Laser Induced Damage in Optical Materials, 1986 : Proceedings of a Symposium, NIST (formerly NBS) Boulder, Colorado, November 3-5, 1986 p707
[74]	Niklasson G A, Li S Y, Granqvist C G 2014 Parallel Session of the 18th International School on Condensed Matter Physics Varna, Bulgaria, September 4-6, 2014 p012001
[75]	Lu S, Hou L, Gan F 1993 J. Mater. Sci. 28 2169
[76]	Soh J H, Wu M, Gu G, Chen L, Hong M 2016 Appl. Opt. 55 3751
[77]	Hao X, Liu X, Kuang C, Li Y 2013 Appl. Phys. Lett. 102 013104
[78]	Ben-Aryeh Y 2006 Appl. Phys. B 84 121
[79]	Wang S Y, Zhang H J, Zhang D X 2013 Acta Phys. Sin. 62 034207 (in Chinese) [王淑莹, 章海军, 张冬仙 2013 物理学报 62 034207]
[80]	Yang H, Trouillon R, Huszka G, Gijs M A 2016 Nano Lett. 16 4862
[81]	Pereira A, Grojo D, Chaker M, Delaporte P, Guay D, Sentis M 2008 Small 4 572
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[83]	Mcleod E, Arnold C B 2009 Opt. Express 17 3640
[84]	Li P Y, Tsao Y, Liu Y J, Lou Z X, Lee W L, Chu S W, Chang C W 2016 Opt. Express 24 16479
[85]	Darafsheh A, Guardiola C, Palovcak A, Finlay J C, Cárabe A 2015 Opt. Lett. 40 5
[86]	Liu C, Jin L D, Ye A P 2016 Acta Phys. Sin. 53 19 (in Chinese) [刘畅, 金璐頔, 叶安培 2016 激光与光电子学进展 53 19]
[87]	Wang Z 2015 Nanoscience 3 193

施引文献

[1]	Abbe E 1873 Acchiv. Mikroskop. Anat. 9 413
[2]	von Helmholtz H 1874 Ann. Phys. Chem. 557
[3]	Stephenson J W 1877 Monthly. Microsc. J. 17 82
[4]	Francia G T D 1952 Suppl. Nuovo. Cim. 9 426
[5]	Hao X, Kuang C, Gu Z, Wang Y, Li S, Ku Y, Ge J, Liu X 2013 Light: Sci. Appl. 2 e108
[6]	Courjon D, Bainier C 1994 Rep. Prog. Phys. 57 989
[7]	Greffet J J, Carminati R 1997 Pro. Surf. Sci. 56 133
[8]	Nassenstein H 1970 Opt. Commun. 2 231
[9]	Ash E A, Nicholls G 1972 Nature 237 510
[10]	Betzig E, Lewis A, Harootunian A, Isaacson M, Kratschmer E 1986 Biophys. J. 49 269
[11]	Pendry J B 2000 Phys. Rev. Lett. 85 3966
[12]	Shalaev V M, Cai W, Chettiar U K, Yuan H K, Sarychev A K, Drachev V P, Kildishev A V 2005 Opt. Lett. 30 3356
[13]	Li X, Yang L, Hu C, Luo X, Hong M 2011 Opt. Express 19 5283
[14]	Aydin K, Bulu I, Ozbay E 2007 Appl. Phys. Lett. 90 77
[15]	Tyc T, Zhang X 2011 Nature 480 42
[16]	Shalaev V M 2007 Nat. Photon 1 41
[17]	Liu Z, Fang N, Yen T J, Xiang Z 2003 Appl. Phys. Lett. 83 5184
[18]	Zhang X, Liu Z 2008 Nature Mater. 7 435
[19]	Liu Z, Lee H, Xiong Y, Sun C, Zhang X 2007 Science 315 1686
[20]	Jacob Z, Alekseyev L, Narimanov E 2006 Opt. Express 14 8247
[21]	Fang N, Lee H, Sun C, Zhang X 2005 Science 308 534
[22]	Upputuri P K, Wen Z B, Wu Z, Pramanik M 2014 J. Biomed. Opt. 19 116003
[23]	Hell S W 2007 Science 316 1153
[24]	Hell S W, Wichmann J 1994 Opt. Lett. 19 780
[25]	Klar T A, Hell S W 1999 Opt. Lett. 24 954
[26]	Betzig E, Patterson G H, Sougrat R, Lindwasser O W, Olenych S, Bonifacino J S, Davidson M W, Lippincottschwartz J, Hess H F 2006 Science 313 1642
[27]	Bastiaens P I H, Squire A 1999 Trends. Cell. Biol. 9 48
[28]	Kenworthy A K 2001 Methods 24 289
[29]	Hein B, Willig K I, Hell S W 2008 Proc. Nat. Acad. Sci. 105 14271
[30]	Min W, Lu S, Chong S, Roy R, Holtom G R, Xie X S 2009 Nature 461 1105
[31]	Wang Z, Guo W, Li L, Luk'Yanchuk B, Khan A, Liu Z, Chen Z, Hong M 2011 Nat. Commun. 2 218
[32]	Darafsheh A, Limberopoulos N I, Derov J S, Walker Jr D E, Astratov V N 2014 Appl. Phys. Lett. 104 061117
[33]	Krivitsky L A, Jia J W, Wang Z, Luk'Yanchuk B 2013 Sci. Rep. 3 3501
[34]	Li L, Guo W, Yan Y, Lee S, Wang T 2013 Light-Sci. Appl. 2 72
[35]	Yang H, Moullan N, Auwerx J, Gijs M A 2014 Small 10 1712
[36]	Guo H, Han Y, Weng X, Zhao Y, Sui G, Wang Y, Zhuang S 2013 Opt. Express 21 2434
[37]	Lee S, Li L, Wang Z 2014 J. Opt. 16 015704
[38]	Allen K W, Farahi N, Li Y, Limberopoulos N I, Walker D E, Urbas A M, Liberman V, Astratov V N 2015 Ann. Phys. 527 513
[39]	Wang Y, Guo S, Wang D, Lin Q, Rong L, Zhao J 2016 Opt. Commun. 366 81
[40]	Lin Q, Wang D, Wang Y, Rong L, Zhao J, Guo S, Wang M 2016 Opt. Quantum Electron. 48 557
[41]	Yan B, Yue L, Wang Z 2016 Opt. Commun. 370 140
[42]	Wang S, Zhang D, Zhang H, Han X, Xu R 2015 Microsc. Res. Tech. 78 1128
[43]	Wu L, Zhu H, Yan B, Wang Z, Zhou S 2015 J. Mater. Chem. C 3 10907
[44]	Hao X, Kuang C, Li Y, Liu X, Ku Y, Jiang Y 2012 Opt. Commun. 285 4130
[45]	Lai H S S, Wang F, Li Y, Jia B, Liu L, Li W J 2016 PLoS One. 11 e0165194
[46]	Guo M, Ye Y H, Hou J, Du B 2016 Appl. Phys. B 122 65
[47]	Guo M, Ye Y H, Hou J, Du B 2015 Photon. Res. 3 339
[48]	Darafsheh A, Walsh G F, Dal Negro L, Astratov V N 2012 Appl. Phys. Lett. 101 14128
[49]	Wang T, Kuang C, Hao X, Liu X 2011 J. Opt. 13 035702
[50]	Lee S, Li L, Wang Z, Guo W, Yan Y, Wang T 2013 Appl. Opt. 52 7265
[51]	Yang H, Gijs M A M 2015 Microelectron. Eng. 143 86
[52]	Yao L, Ye Y H, Feng Ma H, Cao L, Hou J 2015 Opt. Commun. 335 23
[53]	Hao X, Kuang C, Liu X, Zhang H, Li Y 2011 Appl. Phys. Lett. 99 203102
[54]	Lee S, Li L, Benaryeh Y, Wang Z, Guo W 2013 J. Opt. 15 125710
[55]	Lee S, Li L 2015 Opt. Commun. 334 253
[56]	Lu Y F, Zhang L, Song W D, Zheng Y W, Luk'Yanchuk B S 2000 JETP Lett. 72 457
[57]	Chen Z, Taflove A, Backman V 2004 Opt. Express 12 1214
[58]	Yang H, Cornaglia M, Gijs M A M 2015 Nano Lett. 15 46
[59]	Wu M H, Whitesides G M 2001 Appl. Phys. Lett. 78 2273
[60]	Li X, Chen Z, Taflove A, Backman V 2005 Opt. Express 13 526
[61]	Ferrand P, Wenger J, Devilez A, Pianta M, Stout B, Bonod N, Popov E, Rigneault H 2008 Opt. Express 16 6930
[62]	Zhang Z, Geng C, Hao Z, Wei T, Yan Q 2016 Adv. Colloid Interface Sci. 228 105
[63]	Yan Y, Li L, Feng C, Guo W, Lee S, Hong M 2014 ACS Nano 8 1809
[64]	Gu G, Zhou R, Chen Z, Xu H, Cai G, Cai Z, Hong M 2015 Opt. Lett. 40 625
[65]	Kong S C, Taflove A, Backman V 2010 Opt. Express 17 3722
[66]	Zhu H, Chen Z, Chong T C, Hong M 2015 Opt. Express 23 6626
[67]	Houston W V 1927 Phys. Rev. 29 478
[68]	Wu M, Huang B, Chen R, Yang Y, Wu J, Ji R, Chen X, Hong M 2015 Opt. Express 23 20096
[69]	Wu M, Chen R, Soh J, Shen Y, Jiao L, Wu J, Chen X, Ji R, Hong M 2016 Sci. Rep. 6 31637
[70]	Durnin J, Miceli Jr J, Eberly J H 1987 Phys. Rev. Lett. 58 1499
[71]	McGloin D, Dholakia K 2005 Contem. Phys. 46 15
[72]	Li X, Pu M, Zhao Z, Ma X, Jin J, Wang Y, Gao P, Luo X 2016 Sci. Rep. 6 20524
[73]	Bennett, Harold E 1988 Laser Induced Damage in Optical Materials, 1986 : Proceedings of a Symposium, NIST (formerly NBS) Boulder, Colorado, November 3-5, 1986 p707
[74]	Niklasson G A, Li S Y, Granqvist C G 2014 Parallel Session of the 18th International School on Condensed Matter Physics Varna, Bulgaria, September 4-6, 2014 p012001
[75]	Lu S, Hou L, Gan F 1993 J. Mater. Sci. 28 2169
[76]	Soh J H, Wu M, Gu G, Chen L, Hong M 2016 Appl. Opt. 55 3751
[77]	Hao X, Liu X, Kuang C, Li Y 2013 Appl. Phys. Lett. 102 013104
[78]	Ben-Aryeh Y 2006 Appl. Phys. B 84 121
[79]	Wang S Y, Zhang H J, Zhang D X 2013 Acta Phys. Sin. 62 034207 (in Chinese) [王淑莹, 章海军, 张冬仙 2013 物理学报 62 034207]
[80]	Yang H, Trouillon R, Huszka G, Gijs M A 2016 Nano Lett. 16 4862
[81]	Pereira A, Grojo D, Chaker M, Delaporte P, Guay D, Sentis M 2008 Small 4 572
[82]	Mcleod E, Arnold C B 2008 Nature Nanotech. 3 413
[83]	Mcleod E, Arnold C B 2009 Opt. Express 17 3640
[84]	Li P Y, Tsao Y, Liu Y J, Lou Z X, Lee W L, Chu S W, Chang C W 2016 Opt. Express 24 16479
[85]	Darafsheh A, Guardiola C, Palovcak A, Finlay J C, Cárabe A 2015 Opt. Lett. 40 5
[86]	Liu C, Jin L D, Ye A P 2016 Acta Phys. Sin. 53 19 (in Chinese) [刘畅, 金璐頔, 叶安培 2016 激光与光电子学进展 53 19]
[87]	Wang Z 2015 Nanoscience 3 193

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