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石墨烯射频器件研究进展

卢琪 吕宏鸣 伍晓明 吴华强 钱鹤

石墨烯射频器件研究进展

卢琪, 吕宏鸣, 伍晓明, 吴华强, 钱鹤
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  • 石墨烯因具有优良的电学特性,在半导体行业中受到广泛关注,特别因其具有超薄的结构和极高的载流子迁移率,为解决短沟道效应提供了可能,并且在高速电子领域具有应用前景.近年来,使用石墨烯作为沟道材料制备射频晶体管及射频电路是发挥石墨烯材料优势的一个重要研究方向.制造高性能的射频器件,首先要制备出高性能的石墨烯材料.在金属衬底上沉积均匀的单层石墨烯材料或者在绝缘衬底上外延生长单层、双层石墨烯材料都是获得高质量石墨烯材料的常用方法.器件结构及工艺流程的设计也是提升晶体管射频性能的重要因素,多指栅结构、T型栅结构、埋栅结构以及自对准工艺的发展能够有效改善石墨烯射频晶体管的截止频率及最大振荡频率.石墨烯晶体管独特的电学特性使得其除了可以构造与其他半导体材料电路相似的射频电路结构,还可以构造出功能完整并且结构更加简单的新型射频电路结构.
      通信作者: 钱鹤, qianh@mail.tsinghua.edu.cn
    • 基金项目: 国家重点基础研究发展计划(批准号:2013CBA01604)、国家自然科学基金(批准号:61377106,61474072)和北京市自然科学基金(批准号:4162031)资助的课题.
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  • 收稿日期:  2017-07-04
  • 修回日期:  2017-08-04
  • 刊出日期:  2017-11-05

石墨烯射频器件研究进展

  • 1. 清华大学微电子所, 北京 100084;
  • 2. 莱斯大学, 得克萨斯州休斯敦市 77005;
  • 3. 清华信息科学与技术国家实验室, 北京 100084
  • 通信作者: 钱鹤, qianh@mail.tsinghua.edu.cn
    基金项目: 

    国家重点基础研究发展计划(批准号:2013CBA01604)、国家自然科学基金(批准号:61377106,61474072)和北京市自然科学基金(批准号:4162031)资助的课题.

摘要: 石墨烯因具有优良的电学特性,在半导体行业中受到广泛关注,特别因其具有超薄的结构和极高的载流子迁移率,为解决短沟道效应提供了可能,并且在高速电子领域具有应用前景.近年来,使用石墨烯作为沟道材料制备射频晶体管及射频电路是发挥石墨烯材料优势的一个重要研究方向.制造高性能的射频器件,首先要制备出高性能的石墨烯材料.在金属衬底上沉积均匀的单层石墨烯材料或者在绝缘衬底上外延生长单层、双层石墨烯材料都是获得高质量石墨烯材料的常用方法.器件结构及工艺流程的设计也是提升晶体管射频性能的重要因素,多指栅结构、T型栅结构、埋栅结构以及自对准工艺的发展能够有效改善石墨烯射频晶体管的截止频率及最大振荡频率.石墨烯晶体管独特的电学特性使得其除了可以构造与其他半导体材料电路相似的射频电路结构,还可以构造出功能完整并且结构更加简单的新型射频电路结构.

English Abstract

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