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THE COMPENSATION OF DEFECTS AND DOPING IN LPCVD a-Si FILMS

ZHANG PEI-XIAN YAO JIE PENG SHAO-QI

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THE COMPENSATION OF DEFECTS AND DOPING IN LPCVD a-Si FILMS

ZHANG PEI-XIAN, YAO JIE, PENG SHAO-QI
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(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

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  • Abstract views:  7118
  • PDF Downloads:  520
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Publishing process
  • Received Date:  19 December 1986
  • Published Online:  05 June 1987

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