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The microstructure and properties of tetrahedral amorphous carbon films deposited by filtered arc with accelerating at different energetic grades

Zhu Jia-Qi Wang Jing-He Meng Song-He Han Jie-Cai Zhang Lian-Sheng

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The microstructure and properties of tetrahedral amorphous carbon films deposited by filtered arc with accelerating at different energetic grades

Zhu Jia-Qi, Wang Jing-He, Meng Song-He, Han Jie-Cai, Zhang Lian-Sheng
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  • Abstract views:  7907
  • PDF Downloads:  776
  • Cited By: 0
Publishing process
  • Received Date:  15 April 2003
  • Accepted Date:  29 June 2003
  • Published Online:  05 February 2004

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