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Mesoscopic mechanical characterization of hydrogenated silicon thin film and the intrinsic relationship with the microstructure

Wang Quan Ding Jian-Ning He Yu-Liang Xue Wei Fan Zhen

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Mesoscopic mechanical characterization of hydrogenated silicon thin film and the intrinsic relationship with the microstructure

Wang Quan, Ding Jian-Ning, He Yu-Liang, Xue Wei, Fan Zhen
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  • Abstract views:  8699
  • PDF Downloads:  908
  • Cited By: 0
Publishing process
  • Received Date:  18 December 2006
  • Accepted Date:  08 February 2007
  • Published Online:  05 April 2007

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