Time-resolved measurement of plasma emission spectra by pulsed XeCl excimer laser ablation of Al under different conditions is reported. The experimental results show that plasma emission spectra are composed of atomic spectrum, univalent ion spectrum and continuous radiation. The atomic spectrum intensity and duration is most significant, the next is the univalent ion spectrum, the continuous radiation is weakest. The detailed mechanism of species excitation is discussed. The continuum radiation comes from electron bremsstrahlung and recombination of electron and ion, the primary atomic and univalent ion excitation originate from recombination of ion and electron. The experimental results are qualitatively explained with the mechanism.
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