The fabrication of the antireflective periodic nano-arrary structure on Si surface using nanoimprint lithography and the study on its properties

Zhang Zheng; Xu Zhi-Mou; Sun Tang-You; He Jian; Xu Hai-Feng; Zhang Xue-Ming; Liu Shi-Yuan

doi:10.7498/aps.62.168102

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Zhang Zheng, Xu Zhi-Mou, Sun Tang-You, He Jian, Xu Hai-Feng, Zhang Xue-Ming, Liu Shi-Yuan. The fabrication of the antireflective periodic nano-arrary structure on Si surface using nanoimprint lithography and the study on its properties. Acta Physica Sinica, 2013, 62(16): 168102. DOI: 10.7498/aps.62.168102

Citation:

Zhang Zheng, Xu Zhi-Mou, Sun Tang-You, He Jian, Xu Hai-Feng, Zhang Xue-Ming, Liu Shi-Yuan. The fabrication of the antireflective periodic nano-arrary structure on Si surface using nanoimprint lithography and the study on its properties. Acta Physica Sinica, 2013, 62(16): 168102. DOI: 10.7498/aps.62.168102

Citation:

Zhang Zheng, Xu Zhi-Mou, Sun Tang-You, He Jian, Xu Hai-Feng, Zhang Xue-Ming, Liu Shi-Yuan. The fabrication of the antireflective periodic nano-arrary structure on Si surface using nanoimprint lithography and the study on its properties. Acta Physica Sinica, 2013, 62(16): 168102. DOI: 10.7498/aps.62.168102