Fabrication of transparent conductive AZO (ZnO:Al) film by plasma enhanced chemical vapor deposition
Acta Physica Sinica
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Acta Phys. Sin.  2009, Vol. 58 Issue (6): 4260-4266    
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Fabrication of transparent conductive AZO (ZnO:Al) film by plasma enhanced chemical vapor deposition
Chen Zhao-Quan, Liu Ming-Hai, Liu Yu-Ping, Chen Wei, Luo Zhi-Qing, Hu Xi-Wei
华中科技大学电气与电子工程学院,核聚变与电磁新技术教育部重点实验室,武汉 430074
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