Composition and crystal structure of N doped TiO<sub>2</sub> film deposited with different O<sub>2</sub> flow rates
Acta Physica Sinica
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Acta Phys. Sin.  2011, Vol. 60 Issue (2): 028105    
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search  |   
Composition and crystal structure of N doped TiO2 film deposited with different O2 flow rates
Ju Dong-Ying1, Ding Wan-Yu2, Wang Hua-Lin2, Chai Wei-Ping2
(1)Department of Material Science and Engineering, Saitama Institute of Technology, Fukay 369-0293, Japan; (2)Engineering Research Center of Optoelectronic Materials and Devices of Education Department of Liaoning Province, School of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, China
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