[1] Han J W, Oh J S, Meyyappan M 2012 Appl. Phys. Lett. 100 213505
[2] Tonouchi M 2007 Nat. Photonics 1 97
[3] Feng J J, Ren D P, Li H Y, Tang Y, Xing J Y 2011 Terahertz Sci. Technol. 4 164
[4] Stepanov A G, Hebling J, Kuhl J 2003 Appl. Phys. Lett. 83 3000
[5] Liu J F, Zhou Q L, Zhang C L 2013 Appl. Phys. Lett. 103 241911
[6] Kim J, Kim J, Oh H, Meyyappan M, Han J W, Lee J S 2016 J. Vac. Sci. Technol. B 34 042201
[7] Miao J S, Zhang S M, Cai L, Scherr M, Wang C 2015 Nano 9 9236
[8] Kim M, Kim H K 2015 J. Appl. Phys. 118 104504
[9] Gilad D, Er ez, Le eo 2008 Appl. Phys. Lett. 92 262903
[10] Zhao J, Chang B K, XiongY J, Zhang JJ, Zhang Y J 2012 Opt. Commun. 285 589
[11] 张益军, 牛军, 赵静, 邹继军, 常本康 2011 物理学报 60 067301Zhang Y J, Niu J, Zhao J, Zou J J, Chang B K 2011 Acta Phys. Sin. 60 067301
[12] Wang X H, Chang B K, Ren L, Gao P 2011 Appl. Phys. Lett. 98 082109
[13] Zhang Y J, Zou J J, Niu J, Zhao J, Chang B K 2011 J. Appl. Phys. 110 063113
[14] Hao G H, Yang M Z, Chang B K, Chen X L, Zhang J J, Fu X Q 2013 Appl. Opt. 52 5671
[15] 邹继军, 张益军, 杨智, 常本康 2011 物理学报 60 017902Zou J J, Zhang Y J, Yang Z, Chang B K 2011 Acta Phys. Sin. 60 017902
[16] Takuya H, Lothar M, Andreas L, Peter D, Peter H 2015 Appl. Phys. Lett. 106 051109
[17] Gys T 2015 Nucl. Instrum. Methods Phys. Res., Sect. A 787 254
[18] Chao Y C, Hu M C, Tsai W W, Zan H W, Meng H F, Tsai H K, Horng S F 2010 Appl. Phys. Lett. 97 223307
[19] 刘维浩, 张雅鑫, 胡旻, 周俊, 刘盛纲 2012 物理学报 61 127901Liu W H, Zhang Y X, Hu M, Zhou J, Liu S G 2012 Acta Phys. Sin. 61 127901
[20] Hsu S H, Kang W P, Wisitsora-at A, Davidson J L 2012 Diamond Relat. Mater. 22 142
[21] Hsu S H, Kang W P, Raina S, Howell M 2017 J. Vac. Sci. Technol. B 35 032201