[1] 冯黎, 朱雷 2020 功能材料与器件学报 26 191Feng L, Zhu L 2020 J. Funct. Mater. Devices 26 191
[2] 庞玉莲, 邹应全 2015 信息记录材料 16 36Pang Y L, Zou Y Q 2015 Info. Rec. Mater. 16 36
[3] Striccoli M 2017 Science 357 353
[4] Okazaki S 2015 Microelectron. Eng. 133 23
[5] Hong F, Blaikie R 2019 Adv. Opt. Mater. 7 1801653
[6] 王霞, 吕浩, 赵秋玲, 张帅一, 谭永炎 2016 光谱学与光谱分析 36 3461Wang X, Lü H, Zhao Q L, Zhang S Y, Tan Y Y 2016 Spectrosc. Spect. Anal. 36 3461
[7] Fang F Z 2016 Front. Mech. Eng. Chin. 11 325
[8] Luo C, Li J F, Yang X, Wu X, Zhong S Y, Wang C L, Sun L T 2020 ACS Appl. Nano Mater. 3 4747
[9] Martín-Palma R J, Lakhtakia A 2013 Engineered Biomimicry (Boston: Elsevier) pp383−398
[10] LaPedus M 2018 工艺与制造 35 39LaPedus M 2018 Prog. Fabri. 35 39
[11] Ashurbekova K, Ashurbekova K, Botta G, Yurkevich O, Knez M 2020 Nanotechnology 31 342001
[12] Kulkarni A K 1994 B. Mater. Sci. 17 1379
[13] Mattox D M 1992 Plat. Surf. Finish. 79 60
[14] Mattox D M 1998 Plat. Surf. Finish. 85 49
[15] Zhu D M, Miller R A, Nagaraj B A, Bruce R W 2001 Surf. Coat. Technol. 138 1
[16] Muratore C, Walton S G, Leonhardt D, Fernsler R F 2006 J. Vac. Sci. Technol., A 24 25
[17] Kumar T S, Prabu S B, Manivasagam G 2014 J. Mater. Eng. Perform. 23 2877
[18] Yang R B, Bachmann J, Pippel E, Berger A, Woltersdorf J, Gösele U, Nielsch K 2009 Adv. Mater. 21 3170
[19] Bao Q H, Chen C Z, Wang D G, Ji Q M, Lei T Q 2005 Appl. Surf. Sci. 252 1538
[20] Cho A Y, Arthur J R 1975 Prog. Solid State Chem. 10 157
[21] Hong M 1995 J. Cryst. Growth 150 277
[22] Spirkoska D, Colombo C, Heiss M, Abstreiter G, Morral A F I 2008 J. Phys. Condens. Matter 20 454225
[23] Wang X Q, Yoshika A 2011 Thin Film Growth (Sawston Cambridge: Woodhead Publishing) pp288−316
[24] Howson R P, Spencer A G, Lewin R W 1988 Vacuum 38 947
[25] Kelly P J, Arnell R D 2000 Vacuum 56 159
[26] Shi J Z, Chen C Z, Yu H J, Zhang S J 2008 B. Mater. Sci. 31 877
[27] Brauer G, Szyszka B, Vergohl M, Bandorf R 2010 Vacuum 84 1354
[28] Kopecky D, Vrnata M, Kopecka J 2015 Chem. Listy 109 183
[29] von Wenckstern H, Kneiss M, Hassa A, Storm P, Splith D, Grundmann M 2020 Phys. Status Solidi B 257 1900626
[30] Dabrowska-Szata M 2003 Mater. Chem.Phys. 81 257
[31] Ichimiya A 2005 J. Jpn. Soc. Tribologis. 50 731
[32] Wood C 1981 Surf. Sci. 108 L441
[33] Chang C Z, Zhang J S, Feng X, Shen J, Zhang Z C, Guo M H, Li K, Ou Y B, Wei P, Wang L L, Ji Z Q, Feng Y, Ji S H, Chen X, Jia J F, Dai X, Fang Z, Zhang S C, He K, Wang Y Y, Lu L, Ma X C, Xue Q K 2013 Science 340 167
[34] Zhang J S, Chang C Z, Tang P Z, Zhang Z C, Feng X, Li K, Wang L L, Chen X, Liu C X, Duan W H, He K, Xue Q K, Ma X C, Wang Y Y 2013 Science 339 1582
[35] Fei F, Zhang S, Zhang M, Shah S A, Song F, Wang X, Wang B 2019 Adv. Mater. 32 1904593
[36] Guo Q M, Qin Z H, Liu C D, Zang K, Yu Y H, Cao G Y 2010 Surf. Sci. 604 1820
[37] Li L F, Lu S Z, Pan J B, Qin Z H, Wang Y Q, Wang Y L, Cao G Y, Du S X, Gao H J 2014 Adv. Mater. 26 4820
[38] Qin Z H, Pan J B, Lu S Z, Yan S, Wang Y L, Du S X, Gao H J, Cao G Y 2017 Adv. Mater. 29 1606046
[39] Liao M H, Zang Y Y, Guan Z Y, Li H W, Gong Y, Zhu K J, Hu X P, Zhang D, Xu Y, Wang Y Y, He K, Ma X C, Zhang S C, Xue Q K 2018 Nat. Phys. 14 344
[40] 秦志辉 2017 物理学报 66 216802Qin Z H 2017 Acta Phys. Sin. 66 216802
[41] Qin Z 2013 Chin. Phys. B 22 098108
[42] Cahangirov S, Topsakal M, Aktürk E, Şahin H, Ciraci S 2009 Phys. Rev. Lett. 102 236804
[43] Liu C C, Feng W X, Yao Y G 2011 Phys. Rev. Lett. 107 076802
[44] Le Lay G 2015 Nat. Nanotechnol. 10 202
[45] Dávila M E, Xian L, Cahangirov S, Rubio A, Le Lay G 2014 New J. Phys. 16 095002
[46] Derivaz M, Dentel D, Stephan R, Hanf M C, Mehdaoui A, Sonnet P, Pirri C 2015 Nano Lett. 15 2510
[47] Meng L, Wang Y L, Zhang L Z, Du S X, Wu R T, Li L F, Zhang Y, Li G, Zhou H T, Hofer W A, Gao H J 2013 Nano Lett. 13 685
[48] Feng B J, Zhang J, Zhong Q, Li W B, Li S, Li H, Cheng P, Meng S, Chen L, Wu K H 2016 Nat. Chem. 8 564
[49] Feng B, Zhang J, Zhong Q, Li W, Li S, Li H, Cheng P, Meng S, Chen L, Wu K 2016 Nat. Chem. 8 563
[50] Penev E S, Kutana A, Yakobson B I 2016 Nano Lett. 16 2522
[51] Li L F, Wang Y L, Xie S Y, Li X B, Wang Y Q, Wu R T, Sun H B, Zhang S B, Gao H J 2013 Nano Lett. 13 4671
[52] Guo Q, Zhong Y, Huang M, Lu S, Yu Y 2020 Thin Solid Films 693 137709
[53] Guo Q M, Qin Z H, Huang M, Mantsevich V N, Cao G Y 2016 Chin. Phys. B 25 036801
[54] Beinik I, Barth C, Hanbucken M, Masson L 2015 Sci. Rep. 5 8223
[55] Kwong P, Seidel S, Gupta M 2015 J. Vac. Sci. Technol., A 33 031504
[56] McGinn P J 2019 ACS Comb. Sci. 21 501
[57] Nie Z, Shi Y, Qin S, Wang Y, Jiang H, Zheng Q, Cui Y, Meng Y, Song F, Wang X, Turcu I C E, Wang X, Xu Y, Shi Y, Zhao J, Zhang R, Wang F 2019 Commun. Phys. 2 103
[58] Triboulet R 2014 Prog. Cryst. Growth Charact. Matter. 60 1
[59] Wang X R, Yushin G 2015 Energy Environ. Sci. 8 1889
[60] Yu S J, Pak K, Kwak M J, Joo M, Kim B J, Oh M S, Baek J, Park H, Choi G, Kim D H, Choi J, Choi Y, Shin J, Moon H, Lee E, Im S G 2018 Adv. Eng. Mater. 20 1700622
[61] Keyshar K, Gong Y J, Ye G L, Brunetto G, Zhou W, Cole D P, Hackenberg K, He Y M, Machado L, Kabbani M, Hart A H C, Li B, Galvao D S, George A, Vajtai R, Tiwary C S, Ajayan P M 2015 Adv. Mater. 27 4640
[62] Matsuda T, Sato J, Ishikawa T, Ogino A, Nagatsu M 2009 Diam. Relat. Mater. 18 548
[63] Shukla B, Saito T, Yumura M, Iijima S 2009 Chem. Commun. 342 2
[64] Chen H C, Su W R, Yeh Y C 2020 ACS Appl. Mater. Interfaces 12 32905
[65] Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666
[66] Kim M, Safron N S, Han E, Arnold M S, Gopalan P 2010 Nano Lett. 10 1125
[67] Kim Y, Choi D S, Kim H J, Kim H, Kim T Y, Rhyu S H, Lee K S, Yoon D H, Yang W S 2014 J. Ceram. Process. Res. 15 269
[68] Fang W J, Hsu A L, Song Y, Kong J 2015 Nanoscale 7 20335
[69] Sun H, Xu J, Wang C, Ge G, Jia Y, Liu J, Song F, Wan J 2016 Carbon 108 356
[70] Sun H, Fu C, Shen X, Yang W, Guo P, Lu Y, Luo Y, Yu B, Wang X, Wang C, Xu J, Liu J, Song F, Wang G, Wan J 2017 Nanotechnology 28 245604
[71] Tan H, Wang D G, Guo Y B 2018 Coatings 8 40
[72] Jessen B S, Gammelgaard L, Thomsen M R, Mackenzie D M A, Thomsen J D, Caridad J M, Duegaard E, Watanabe K, Taniguchi T, Booth T J, Pedersen T G, Jauho A P, Boggild P 2019 Nat. Nanotechnol. 14 340
[73] Wu J, Li Y, Pan D, Jiang C, Jin C, Song F, Wang G, Wan J 2019 Carbon 147 434
[74] Jia K, Ci H, Zhang J, Sun Z, Ma Z, Zhu Y, Liu S, Liu J, Sun L, Liu X, Sun J, Yin W, Peng H, Lin L, Liu Z 2020 Angew. Chem. Int. Ed. 59 17214
[75] Li X, Cai W, Colombo L, Ruoff R S 2009 Nano Lett. 9 4268
[76] Puurunen R L 2005 J. Appl. Phys. 97 121301
[77] Kol'tsov S I, Aleskovskii V B 1967 Zh. Prikl. Khim. 40 907
[78] Kol'tsov S I, Aleskovskii V B 1969 Zh. Prikl. Khim. 42 1023
[79] Suntola T, Antson J U.S. Patent 4058430 [1977-11-15]
[80] Longo E, Mantovan R, Cecchini R, Overbeek M D, Longo M, Trevisi G, Lazzarini L, Tallarida G, Fanciulli M, Winter C H, Wiemer C 2020 Nano Res. 13 570
[81] Ahvenniemi E, Karppinen M 2016 Dalton Trans. 45 10730
[82] Leskelä M, Ritala M 2003 Angew. Chem. Int. Ed. 42 5548
[83] Yang H C, Waldman R Z, Chen Z W, Darling S B 2018 Nanoscale 10 20505
[84] Griffiths M B E, Pallister P J, Mandia D J, Barry S T 2016 Chem. Mater. 28 44
[85] Ahn J, Ahn C, Jeon S, Park J 2019 Appl. Sci. 9 1990
[86] Marichy C, Bechelany M, Pinna N 2012 Adv. Mater. 24 1017
[87] Ovanesyan R A, Filatova E A, Elliott S D, Hausmann D M, Smith D C, Agarwal S 2019 J. Vac. Sci. Technol., A 37 060904
[88] Solanki R, Huo J, Freeouf J L, Miner B 2002 Appl. Phys. Lett. 81 3864
[89] Andou Y, Nishida H, Endo T 2006 Chem. Commun. 501 8
[90] Amitonova L V, de Boer J F 2020 Light-Sci. Appl. 9 81
[91] Clary J, Norman S, Funke H, Su D, Musgrave C, Weimer A 2020 Nanotechnology 31 175703
[92] Cao K, Cai J, Chen R 2020 Chem. Mater. 32 2195
[93] Shimamura H, Nakamura T 2010 Polym. Degrad. Stab. 95 21
[94] Klesko J P, Kerrigan M M, Winter C H 2016 Chem. Mater. 28 700
[95] Kerrigan M M, Klesko J P, Winter C H 2017 Chem. Mater. 29 7458
[96] Knisley T J, Kalutarage L C, Winter C H 2013 Coord. Chem. Rev. 257 3222
[97] Eigenfeld N T, Gray J M, Brown J J, Skidmore G D, George S M, Bright V M 2014 Adv. Mater. 26 3962
[98] Knisley T J, Saly M J, Heeg M J, Roberts J L, Winter C H 2011 Organometallics 30 5010
[99] Krozer A, Rodahl M 1997 J. Vac. Sci. Technol., A 15 1704
[100] Chen R, Bent S F 2006 Adv. Mater. 18 1086
[101] Wojtecki R, Mettry M, Fine Nathel N F, Friz A, De Silva A, Arellano N, Shobha H 2018 ACS Appl. Mater. Interfaces 10 38630
[102] Koenig M, Lahann J 2017 Beilstein J. Nanotechnol. 8 1250
[103] Chang Y H, Liu C M, Tseng Y C, Chen C, Chen C C, Cheng H E 2010 Nanotechnology 21 225602
[104] Kim S W, Han T H, Kim J, Gwon H, Moon H S, Kang S W, Kim S O, Kang K 2009 ACS Nano 3 1085
[105] Ban C M, George S M 2016 Adv. Mater. Interfaces 3 1600762
[106] Liu L, Karuturi S K, Su L T, Tok A I Y 2011 Energy Environ. Sci. 4 209
[107] Mackus A J M, Bol A A, Kessels W M M 2014 Nanoscale 6 10941
[108] Skoog S A, Elam J W, Narayan R J 2013 Int. Mater. Rev. 58 113
[109] Szilagyi I M, Teucher G, Harkonen E, Farm E, Hatanpaa T, Nikitin T, Khriachtchev L, Rasanen M, Ritala M, Leskela M 2013 Nanotechnology 24 245701
[110] Gebhard M, Mitschker F, Hoppe C, Aghaee M, Rogalla D, Creatore M, Grundmeier G, Awakowicz P, Devi A 2018 Plasma Process. Polym. 15 e1700209
[111] Kim K M, Jang J S, Yoon S G, Yun J Y, Chung N K 2020 Materials 13 2008
[112] Choudhury D, Sarkar S K 2014 Chem. Vapor Depos. 20 130
[113] Yoshimura T 2016 Macromol. Symp. 361 141
[114] Poodt P, Cameron D C, Dickey E, George S M, Kuznetsov V, Parsons G N, Roozeboom F, Sundaram G, Vermeer A 2012 J. Vac. Sci. Technol., A 30 010802
[115] Poodt P, van Lieshout J, Illiberi A, Knaapen R, Roozeboom F, van Asten A 2013 J. Vac. Sci. Technol., A 31 01A108
[116] Sharma K, Hall R A, George S M 2015 J. Vac. Sci. Technol., A 33 01A132
[117] Mousa M B M, Ovental J S, Brozena A H, Oldham C J, Parsons G N 2018 J. Vac. Sci. Technol., A 36 031517
[118] Satpati A K, Arroyo-Curras N, Ji L, Yu E T, Bard A J 2013 Chem. Mater. 25 4165
[119] Venkatraman K, Gusley R, Lesak A, Akolkar R 2019 J. Vac. Sci. Technol., A 37 020901
[120] Elam J W 2012 Atomic Layer Deposition of Nanostructured Materials (Weinheim: Wiley-VCH Verlag GmbH & Co. KGaA) pp227−249
[121] Chen R, Kim H, McIntyre P C, Porter D W, Bent S F 2005 Appl. Phys. Lett. 86 191910
[122] Lee H B R, Bent S F 2012 Atomic Layer Deposition of Nanostructured Materials (Weinheim: Wiley-VCH Verlag GmbH & Co. KGaA) pp193−225
[123] Hashemi F S M, Prasittichai C, Bent S F 2014 J. Phys. Chem. C 118 10957
[124] Minaye Hashemi F S, Prasittichai C, Bent S F 2015 ACS Nano 9 8710
[125] Hashemi F S M, Bent S F 2016 Adv. Mater. Interfaces 3 1600464
[126] Seo S, Yeo B C, Han S S, Yoon C M, Yang J Y, Yoon J, Yoo C, Kim H J, Lee Y B, Lee S J, Myoung J M, Lee H B R, Kim W H, Oh I K, Kim H 2017 ACS Appl. Mater. Interfaces 9 41607
[127] Farm E, Kemell M, Santala E, Ritala M, Leskela M 2010 J. Electrochem. Soc. 157 K10
[128] Lee W, Prinz F B 2009 J. Electrochem. Soc. 156 G125
[129] Horiike Y, Tanaka T, Nakano M, Iseda S, Sakaue H, Nagata A, Shindo H, Miyazaki S, Hirose M 1990 J. Vac. Sci. Technol., A 8 1844
[130] Athavale S D 1996 J. Vac. Sci. Technol., B 14 3702
[131] Dimiev A, Kosynkin D V, Sinitskii A, Slesarev A, Sun Z, Tour J M 2011 Science 331 1168
[132] Faraz T, Roozeboom F, Knoops H, Kessels W M M 2015 ECS J. Solid State SC 4 N5023
[133] Lee Y, DuMont J W, George S M 2015 Chem. Mater. 27 3648
[134] Oehrlein G, Metzler D, Li C 2015 ECS J. Solid State SC 4 N5041
[135] Kauppinen C, Khan S A, Sundqvist J, Suyatin D B, Suihkonen S, Kauppinen E I, Sopanen M 2017 J. Vac. Sci. Technol., A 35 060603
[136] Kim K S, Ji Y J, Nam Y, Kim K H, Singh E, Lee J Y, Yeom G Y 2017 Sci. Rep. 7 2462
[137] Kim K S, Kim K H, Nam Y, Jeon J, Yim S, Singh E, Lee J Y, Lee S J, Jung Y S, Yeom G Y, Kim D W 2017 ACS Appl. Mater. Interfaces 9 11967
[138] Park J W, Kim D S, Mun M K, Lee W O, Kim K S, Yeom G Y 2017 J. Phys. D: Appl. Phys. 50 254007
[139] Shinoda K, Miyoshi N, Kobayashi H, Kurihara M, Izawa M, Ishikawa K, Hori M 2017 ECS Trans. 80 3
[140] Abdulagatov A I, George S M 2018 Chem. Mater. 30 8465
[141] Cheng Y, Wang K, Qi Y, Liu Z 2020 Acta Phys.-Chim. Sin. 2021 37
[142] Wang M, Fu L, Gan L, Zhang C, Rummeli M, Bachmatiuk A, Huang K, Fang Y, Liu Z 2013 Sci. Rep. 3 1238