| 引用本文: |
|
| Citation: |
|
计量
- 文章访问数: 3391
- PDF下载量: 1100
- 被引次数: 0
物理学报. 2004, 53(1): 31-36.
doi: 10.7498/aps.53.31.
U形阵列式微机械悬臂梁的研究
- 收稿日期: 2003-01-21
- 修回日期: 2003-04-09
- 刊出日期: 2004-01-15
English Abstract
A study of U-shaped micromachined cantilever array
- Received Date:
21 January 2003
- Accepted Date:
09 April 2003
- Published Online:
15 January 2004
Abstract: In order to increase the resolution and realize the versatility of cantilever, U-shaped piezoresistive cantilever array has been designed and fabricated in this research. The optimized geometries of cantilever and piezoresistor were determined by analyzing the stress, noise and sensitivity of piezoresistive cantilever from theory. Based on silicon micromachining technology, the piezoresistive cantilevers were fabricated by using polysilicon as the piezoresistive materials. With the measurement results of noise and sensitivity, the Hooge factor was calculated to be 3×10-3, the gauge factor is 27, and the minimum detectable deflection of piezoresistive cantilever was calculated to be 0.5nm at a 6V bias voltage and a 1000Hz measurement bandwidth. The noise sources of polysilicon pizeoresistor are also discussed in this paper.
-
Keywords:
- cantilever /
- noise /
- sensitivity /
- minimum detectable deflection
下载:
