表面颗粒污染物诱导薄光学元件初始损伤的机理

孙晓艳; 雷泽民; 卢兴强; 范滇元

doi:10.7498/aps.63.134201

摘要

基于光传输理论研究了前表面颗粒污染物诱导薄光学元件产生初始损伤的原因，提出了颗粒遮光效应和颗粒造成的光学元件局部热变形两者共同作用对光束进行扰动的损伤机理. 研究结果表明：对于高功率激光光束，薄光学元件局部热变形对光束的扰动是产生较高光强调制的重要原因；随着激光脉冲发射次数的增加，局部热变形的表面形状、位相延迟幅度、热扩散长度不断变化，会在光学元件内不同厚度处和后表面xy方向上的不同位置处产生较高的光强调制，不仅容易引起后表面产生多个损伤点，也可能在光学元件内就产生损伤，并且在厚度方向上的损伤点是分散的.

关键词:

Abstract

Based on the optical transmission theory, the reason why front-surface particle contamination may induce the original damage of thin optical components is considered, and a damage mechanism is put forward: The localized thermal deformation of an optical element induced by the thermal effect of particle contamination together with the shading effect of it can disturb the laser beams. Simulated results show that for a high power laser, the localized thermal deformation of thin optical components, which disturbs the laser beam, is an important cause to produce strong light intensity modulations. The surface shape, phase delay, and thermal diffusion length of a localized thermal deformation are constantly changing with the increase of laser pulse shot number, so the highest light intensity modulation will be produced at different positions in the thickness direction or the xy direction on the rear-surface of an optical element. This not only can easily induce some damages on the rear-surface of the optical element, but also cause the interior damages scattered in the thickness direction.

Keywords:

作者及机构信息

1.
中国科学院上海光学精密机械研究所, 高功率激光物理国家实验室, 上海 201800;

2.
中国科学院大学, 北京 100049

基金项目: 国家自然科学基金（批准号：60707019）资助的课题.

Authors and contacts

1.
National Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;

2.
School of Chinese Academy of Sciences, Beijing 100049, China

Funds: Project supported by the National Natural Science Foundation of China (Grant No.60707019).

参考文献

[1]	Bien-Aime K, Neauport J, Tovena-Pecault I, Fargin E, Labrugere C, Belin C, Couzi M 2009 Appl. Opt. 48 2228
[2]	Zhou X D, Huang J, Wang F R, Liu H J, Jiang X D 2011 SPIE 8206 820619
[3]	Genin F Y, Sheehan L M, Yoshiyama J M, Dijon J, Garrec P 1997 SPIE 3244 155
[4]	Feit M D, Rubenchik A M, Faux D R, Riddle R A, Shapiro A, Eder D C, Penetrante B M, Milam D, Genin F Y, Kozlowski M R 1996 SPIE 2966 417
[5]	Genin F Y, Kozlowski M R, Brusasco R 1997 SPIE 3407 987
[6]	Genin F Y, Feit M D, Kozlowski M R, Rubenchik A M, Salleo A, Yoshiyama J 2000 Appl. Opt. 39 3654
[7]	Honig J, Norton M A, Hollingsworth W G, Donohue E E, Johnson M A 2004 SPIE 5647 129
[8]	Mainguy S, Tovena-Pecault I, Garrec B L 2005 SPIE 5991 59910G
[9]	Su Q Q, Zhang G W, Tao H, Pu J X 2011 Chinese J. Lasers 38 s102004 (in Chinese) [苏倩倩, 张国文, 陶华, 蒲继雄 2011 中国激光 38 s102004]
[10]	Su Q Q, Zhang G W, Tao H, Pu J X 2011 Chinese J. Lasers 38 1002005 (in Chinese) [苏倩倩, 张国文, 陶华, 蒲继雄 2011 中国激光 38 1002005]
[11]	Zhang G W, Lu X Q, Cao H B, Yin X H, Lv F N, Zhang Z, Li J H, Wang R G, Ma W X, Zhu J 2012 Acta Phys. Sin. 61 024201 (in Chinese)[张国文, 卢兴强, 曹华保, 尹宪华, 吕凤年, 张臻, 李菁辉, 王仁贵, 马伟新, 朱俭 2012 物理学报 61 024201]
[12]	Xie L P, Jing F, Zhao J L, Su J Q, Wang W Y, Peng H S 2004 Opt. Commun. 236 343
[13]	Xie L P, Zhao J L, Su J Q, Wang W Y, Peng H S 2004 Acta Phys. Sin. 53 2175 (in Chinese)[谢良平, 赵建林, 粟敬钦, 景峰, 王文义, 彭翰生 2004 物理学报 53 2175]
[14]	Xie L P, Su J Q, Jing F, Zhao J L, Wang W Y, Wang X, Peng Z T 2004 High Power Laser and Particle Beams 16 571 (in Chinese) [谢良平, 粟敬钦, 景峰, 赵建林, 王文义, 王逍, 彭志涛 2004 强激光与离子束 16 571]
[15]	Peng T, Zhao J L, Xie L P, Ye Z J, Li Q, Su J Q 2007 Acta Phys. Sin. 56 3255 (in Chinese)[彭涛, 赵建林, 谢良平, 叶知隽, 李强, 粟敬钦 2007 物理学报 56 3255]
[16]	Peng T, Zhao J L, Li D, Ye Z J, Xie L P 2009 Chin. Phys. B 18 1884
[17]	Wang Y W, Hu Y H, Wen S C, You K M, Fu X Q 2007 Acta Phys. Sin. 56 5855 (in Chinese)[王友文, 胡勇华, 文双春, 游开明, 傅喜泉 2007 物理学报 56 5855]
[18]	Wang Y W, Wen S C, Zhang L F, Hu Y H, Fan D Y 2008 Appl. Opt. 47 1152
[19]	Wang Y W, Deng J Q, Chen L Z, Wen S C, You K M 2009 Chin. Phys. Lett. 26 024205
[20]	Hu Y H, Wang Y W, Wen S C, Fan D Y 2010 Chin. Phys. B 19 114207
[21]	Cai Z B, Zhao J L, Peng T, Li D 2011 Acta Phys. Sin. 60 114209 (in Chinese)[蔡朝斌, 赵建林, 彭涛, 李东 2011 物理学报 60 114209]
[22]	Miao X X, Cheng X F, Yuan X D, Lv H B, Ye Y Y, He S B, Zheng W G 2010 High Power Laser and Particle Beams 22 1740 (in Chinese) [苗心向, 程晓锋, 袁晓东, 吕海兵, 叶亚云, 贺少勃, 郑万国 2010 强激光与粒子束 22 1740]
[23]	Wang L B, Ma W X, Ji L L, Zhao D F 2012 Chin. J. Laser 39 0502004 (in Chinese) [王立斌, 马伟新, 季来林, 赵东峰 2012 中国激光 39 0502004]
[24]	Zhou L D, Su J Q, Li P, Liu L Q, Wang W Y, Wang F, Mo L, Cheng W Y, Zhang X M 2009 Acta Phys. Sin. 58 6279 (in Chinese)[周丽丹, 粟敬钦, 李平, 刘兰琴, 王文义, 王方, 莫磊, 程文雍, 张小民 2009 物理学报 58 6279]
[25]	Zhou L D, Su J Q, Li P, Wang W Y, Liu L Q, Zhang Y, Zhang X M 2011 Acta Phys. Sin. 60 024202 (in Chinese)[周丽丹, 粟敬钦, 李平, 王文义, 刘兰琴, 张颖, 张小民 2011 物理学报 60 024202]
[26]	Fan S H, He H B, Fan Z X, Shao J D, Zhao Y A 2005 Acta Phys. Sin. 54 5774 (in Chinese)[范树海, 贺洪波, 范正修, 邵建达, 赵元安 2005 物理学报 54 5774]
[27]	Li B C, Martin S, Welsch E 2000 Appl Opt 39 4690
[28]	Parent A, Morin M, Lavigne P 1992 Optical and Quantum Electronics 24 S1071
[29]	Liu H J, Jing F, Zuo Y L, Wei X F, Hu D X, Peng Z T, Li Q, Zhou W, Zhang K, Jiang L, Li Z J, Zuo M 2006 High Power Laser and Particle Beams 18 1850 (in Chinese) [刘红婕, 景峰, 左言磊, 魏晓峰, 胡东霞, 彭志涛, 李强, 周维, 张昆, 姜蕾, 李志军, 左明 2006 强激光与粒子束 18 1850]
[30]	Chen X Q, Chen Z Y, Pu J X, Zhu J Q, Zhang G W 2013 Acta Phys. Sin. 62 044213 (in Chinese) [陈雪琼, 陈子阳, 蒲继雄, 朱健强, 张国文 2013 物理学报 62 044213]
[31]	Chen F, Meng S X 1998 Progress in Physics 18 187 (in Chinese) [陈飞, 孟绍贤 1998 物理学进展 18 187]

施引文献

[1]	Bien-Aime K, Neauport J, Tovena-Pecault I, Fargin E, Labrugere C, Belin C, Couzi M 2009 Appl. Opt. 48 2228
[2]	Zhou X D, Huang J, Wang F R, Liu H J, Jiang X D 2011 SPIE 8206 820619
[3]	Genin F Y, Sheehan L M, Yoshiyama J M, Dijon J, Garrec P 1997 SPIE 3244 155
[4]	Feit M D, Rubenchik A M, Faux D R, Riddle R A, Shapiro A, Eder D C, Penetrante B M, Milam D, Genin F Y, Kozlowski M R 1996 SPIE 2966 417
[5]	Genin F Y, Kozlowski M R, Brusasco R 1997 SPIE 3407 987
[6]	Genin F Y, Feit M D, Kozlowski M R, Rubenchik A M, Salleo A, Yoshiyama J 2000 Appl. Opt. 39 3654
[7]	Honig J, Norton M A, Hollingsworth W G, Donohue E E, Johnson M A 2004 SPIE 5647 129
[8]	Mainguy S, Tovena-Pecault I, Garrec B L 2005 SPIE 5991 59910G
[9]	Su Q Q, Zhang G W, Tao H, Pu J X 2011 Chinese J. Lasers 38 s102004 (in Chinese) [苏倩倩, 张国文, 陶华, 蒲继雄 2011 中国激光 38 s102004]
[10]	Su Q Q, Zhang G W, Tao H, Pu J X 2011 Chinese J. Lasers 38 1002005 (in Chinese) [苏倩倩, 张国文, 陶华, 蒲继雄 2011 中国激光 38 1002005]
[11]	Zhang G W, Lu X Q, Cao H B, Yin X H, Lv F N, Zhang Z, Li J H, Wang R G, Ma W X, Zhu J 2012 Acta Phys. Sin. 61 024201 (in Chinese)[张国文, 卢兴强, 曹华保, 尹宪华, 吕凤年, 张臻, 李菁辉, 王仁贵, 马伟新, 朱俭 2012 物理学报 61 024201]
[12]	Xie L P, Jing F, Zhao J L, Su J Q, Wang W Y, Peng H S 2004 Opt. Commun. 236 343
[13]	Xie L P, Zhao J L, Su J Q, Wang W Y, Peng H S 2004 Acta Phys. Sin. 53 2175 (in Chinese)[谢良平, 赵建林, 粟敬钦, 景峰, 王文义, 彭翰生 2004 物理学报 53 2175]
[14]	Xie L P, Su J Q, Jing F, Zhao J L, Wang W Y, Wang X, Peng Z T 2004 High Power Laser and Particle Beams 16 571 (in Chinese) [谢良平, 粟敬钦, 景峰, 赵建林, 王文义, 王逍, 彭志涛 2004 强激光与离子束 16 571]
[15]	Peng T, Zhao J L, Xie L P, Ye Z J, Li Q, Su J Q 2007 Acta Phys. Sin. 56 3255 (in Chinese)[彭涛, 赵建林, 谢良平, 叶知隽, 李强, 粟敬钦 2007 物理学报 56 3255]
[16]	Peng T, Zhao J L, Li D, Ye Z J, Xie L P 2009 Chin. Phys. B 18 1884
[17]	Wang Y W, Hu Y H, Wen S C, You K M, Fu X Q 2007 Acta Phys. Sin. 56 5855 (in Chinese)[王友文, 胡勇华, 文双春, 游开明, 傅喜泉 2007 物理学报 56 5855]
[18]	Wang Y W, Wen S C, Zhang L F, Hu Y H, Fan D Y 2008 Appl. Opt. 47 1152
[19]	Wang Y W, Deng J Q, Chen L Z, Wen S C, You K M 2009 Chin. Phys. Lett. 26 024205
[20]	Hu Y H, Wang Y W, Wen S C, Fan D Y 2010 Chin. Phys. B 19 114207
[21]	Cai Z B, Zhao J L, Peng T, Li D 2011 Acta Phys. Sin. 60 114209 (in Chinese)[蔡朝斌, 赵建林, 彭涛, 李东 2011 物理学报 60 114209]
[22]	Miao X X, Cheng X F, Yuan X D, Lv H B, Ye Y Y, He S B, Zheng W G 2010 High Power Laser and Particle Beams 22 1740 (in Chinese) [苗心向, 程晓锋, 袁晓东, 吕海兵, 叶亚云, 贺少勃, 郑万国 2010 强激光与粒子束 22 1740]
[23]	Wang L B, Ma W X, Ji L L, Zhao D F 2012 Chin. J. Laser 39 0502004 (in Chinese) [王立斌, 马伟新, 季来林, 赵东峰 2012 中国激光 39 0502004]
[24]	Zhou L D, Su J Q, Li P, Liu L Q, Wang W Y, Wang F, Mo L, Cheng W Y, Zhang X M 2009 Acta Phys. Sin. 58 6279 (in Chinese)[周丽丹, 粟敬钦, 李平, 刘兰琴, 王文义, 王方, 莫磊, 程文雍, 张小民 2009 物理学报 58 6279]
[25]	Zhou L D, Su J Q, Li P, Wang W Y, Liu L Q, Zhang Y, Zhang X M 2011 Acta Phys. Sin. 60 024202 (in Chinese)[周丽丹, 粟敬钦, 李平, 王文义, 刘兰琴, 张颖, 张小民 2011 物理学报 60 024202]
[26]	Fan S H, He H B, Fan Z X, Shao J D, Zhao Y A 2005 Acta Phys. Sin. 54 5774 (in Chinese)[范树海, 贺洪波, 范正修, 邵建达, 赵元安 2005 物理学报 54 5774]
[27]	Li B C, Martin S, Welsch E 2000 Appl Opt 39 4690
[28]	Parent A, Morin M, Lavigne P 1992 Optical and Quantum Electronics 24 S1071
[29]	Liu H J, Jing F, Zuo Y L, Wei X F, Hu D X, Peng Z T, Li Q, Zhou W, Zhang K, Jiang L, Li Z J, Zuo M 2006 High Power Laser and Particle Beams 18 1850 (in Chinese) [刘红婕, 景峰, 左言磊, 魏晓峰, 胡东霞, 彭志涛, 李强, 周维, 张昆, 姜蕾, 李志军, 左明 2006 强激光与粒子束 18 1850]
[30]	Chen X Q, Chen Z Y, Pu J X, Zhu J Q, Zhang G W 2013 Acta Phys. Sin. 62 044213 (in Chinese) [陈雪琼, 陈子阳, 蒲继雄, 朱健强, 张国文 2013 物理学报 62 044213]
[31]	Chen F, Meng S X 1998 Progress in Physics 18 187 (in Chinese) [陈飞, 孟绍贤 1998 物理学进展 18 187]

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